Abstract: The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

Abstract: The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

Abstract: A method of measuring a position of a mark in a chamber, a pressure inside the chamber being different from a pressure outside the chamber. The method includes a first detection step of illuminating a reference mark fixedly disposed in the chamber using a first illuminator disposed inside the chamber, and detecting the reference mark using a detector disposed outside the chamber. The method also includes a second detection step of illuminating a mark, which is movable with respect to the reference mark in the chamber, using a second illuminator disposed inside the chamber, and detecting the mark using the detector. The method further includes a calculation step of calculating a position of the mark with respect to the reference mark based on detection results of the first and second detection steps.

Abstract: The present invention provides a method and apparatus for detecting the position of a first mark disposed inside a variable-pressure chamber using a detector disposed outside the chamber and detecting a second mark on an object disposed inside the chamber using the detector. The position of the second mark relative to the first mark is determined based on the detected positions of the first and second marks.

Abstract: A method of measuring a position of a mark in a chamber in which a pressure inside the chamber is different from a pressure outside the chamber. The method includes a first detection step of detecting a reference mark fixedly disposed in the chamber, through a window arranged on the chamber, using a detector disposed outside the chamber, a second detection step of detecting the mark movable with respect to the reference mark in the chamber through the window using the detector, and a calculation step of calculating a position of the mark with respect to the reference mark based on detection results of the first and second detection steps, so as to suppress a detection error caused by at least one of deformations of the chamber and the window, in which at least one deformation is due to a difference between the pressure inside the chamber and the pressure outside the chamber.

Abstract: The present invention provides a method and apparatus for detecting the position of a first mark disposed inside a variable-pressure chamber using a detector disposed outside the chamber and detecting a second mark on an object disposed inside the chamber using the detector. The position of the second mark relative to the first mark is determined based on the detected positions of the first and second marks.

Abstract: An original chuck for holding an original includes a plurality of attracting and holding portions for holding the original, each of the plurality of attracting and holding portions having a supporting member for supporting the original with point contact, and an attracting pad of an elastic material for surrounding the supporting member. The original chuck also includes an adjusting mechanism for adjustably moving at least one of the attracting and holding portions in a direction orthogonal to a supporting surface of a respective supporting member.

Abstract: Disclosed in an original chuck effective to prevent deformation of an original as the same is attracted and held by the chuck, thereby to reduce distortion of a pattern of the original or distortion of a pattern transferred to a substrate, such as a wafer, due to the deformation of the original. The original chuck includes four attracting and holding portions disposed to attract four corners of the original, and each attracting and holding portion has a steel ball to be engaged with the original and an attracting pad surrounding the steel ball and being made of an elastic material. A negative pressure is produced inside the attraction pad, in response to an operation of a vacuum source and through an attracting bore, such that the attracting pads attract the original while the steel balls support the original through point contact. In one preferred from, at least one of the attracting and holding portions is made adjustable upwardly/downwardly.