Abstract: An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having a predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.

Abstract: There is provided a piezoelectric thin film device with its frequency impedance characteristic unsusceptible to spuriousness. A film bulk acoustic resonator has a configuration where an adhesive layer, a lower electrode, a piezoelectric thin film, and an upper electrode are laminated in this order on a support substrate. A drive section of the upper electrode and a drive section of the lower electrode are opposed to each other with the piezoelectric thin film interposed therebetween. The respective drive section has a slender two-dimensional shape, with magnitude in its longitudinal direction being not less than twice, more desirably four times, and further desirably ten times, as large as magnitude in its widthwise direction.

Abstract: An object of the present invention is to provide a piezoelectric thin film device including a single or a plurality of film bulk acoustic resonators wherein a frequency impedance characteristic is unsusceptible to spuriousness. In a film bulk acoustic resonator, a piezoelectric thin film is supported by a support substrate via an adhesive layer. An upper electrode and a lower electrode each having predetermined pattern are formed on upper and lower surfaces of the piezoelectric thin film. Further, on the upper surface of the piezoelectric thin film, an additional film for adding a mass to an outside of an excitation region is formed as superposed on the upper electrode.

Abstract: There is provided a piezoelectric thin film device with its frequency impedance characteristic unsusceptible to spuriousness. A film bulk acoustic resonator has a configuration where an adhesive layer, a lower electrode, a piezoelectric thin film, and an upper electrode are laminated in this order on a support substrate. A drive section of the upper electrode and a drive section of the lower electrode are opposed to each other with the piezoelectric thin film interposed therebetween. The respective drive section has a slender two-dimensional shape, with magnitude in its longitudinal direction being not less than twice, more desirably four times, and further desirably ten times, as large as magnitude in its widthwise direction.

Abstract: A vibrator for generating a signal for measuring a physical quantity using a vibrator is provided, including at least one bending vibration arm vibrating in bending mode along a specified plane and having a first end, an opposed second end, and first and second main faces that are substantially parallel with each other. A base portion is provided at the first provided at the first end of the bending vibration arm, a weight portion is provided at the second end of the bending vibration arm, and grooves are formed on the first and second main faces. The vibrator further includes driving means for exciting a driving vibration in the vibrator, and detecting means provided on one of the bending vibration arms for detecting an output signal based on detection vibrations induced in the vibrator responsive to the physical quantity to be measured.

Abstract: A vibrator for a vibratory gyroscope including a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part. The base part and bending-vibration piece are formed to extend substantially in a specified plane. At the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, wherein the resonant arms project from the fixing part. With this arrangement, it is possible to detect a turning angular rate with high accuracy.

Abstract: The object of the present invention is to improve the sensitivity of a vibrator having at least one bending vibration arm vibrating along a specified plane in bending mode, and a base portion provided at one end of the arm. A vibrator 20A has at least one bending vibration arms 14, 15 vibrating along a specified plane in bending mode, base portions 1 and 22 provided at one ends of the arms 14 and 15, respectively, and weight portions 9, 12 provided at the other ends of the arms 14 and 15, respectively. Grooves 5 and 6 are formed on one main face 33 and the other main face 34 substantially parallel with the specified plane of the bending vibration arms 14 and 15, respectively.

Abstract: A vibrator for a vibratory gyroscope including a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part. The base part and bending-vibration piece are formed to extend substantially in a specified plane. At the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, wherein the resonant arms project from the fixing part. With this arrangement, it is possible to detect a turning angular rate with high accuracy.

Abstract: A vibrator for a vibratory gyroscope including a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part. The base part and bending-vibration piece are formed to extend substantially in a specified plane. At the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, wherein the resonant arms project from the fixing part. With this arrangement, it is possible to detect a turning angular rate with high accuracy.

Abstract: A vibratory gyroscope for detecting a turning angular rate of rotation applied to a vibrator in a predetermined temperature range is disclosed. The vibratory gyroscope has a vibrator, a supporting member for supporting the vibrator and an adhesive portion made of an adhesive provided between the supporting member and the vibrator for bonding the vibrator to the supporting member. The vibratory gyroscope detects a turning angular rate based on a detecting vibration excited in the vibrator according to rotation when a driving vibration is excited in the vibrator. The adhesive has a tan &dgr; not higher than 0.1 within the temperature range.

Abstract: A vibrator for a vibratory gyroscope including a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part. The base part and bending-vibration piece are formed to extend substantially in a specified plane. At the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, wherein the resonant arms project from the fixing part. With this arrangement, it is possible to detect a turning angular rate with high accuracy.

Abstract: A vibratory gyroscope for detecting a turning angular rate in a turning system is provided. The gyroscope comprises a vibrator, an exciting means for exciting driving vibration in the vibrator, and a detecting means for detecting vibration induced in the vibrator. The vibrator comprises a plurality of vibration systems 1A, 1B, 2A and 2B, which are formed within a specified plane intersecting the turning axis Z. Vibration systems comprises first vibration systems 1A and 1B whose vibrations include radial vibration components, in which the center of gravity of first vibration system vibrates in a radial direction in the specified plane with respect to the center of gravity GO of the vibrator. The vibration systems also comprises second vibration systems 2A and 2B whose vibrations include circumferential vibration components, in which the center of gravity of vibration of the second vibration system vibrates in the specified plane along a circle with the center of gravity GO as its center.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: A vibrator of a vibratory gyroscope comprises a main arm having a base part and at least one bending-vibration piece extending from the base part in a direction crossing the longitudinal direction of the base part and a fixing part for fixing one end of the base part, and the base part and the bending-vibration piece are formed so as to extend substantially in a specified plane. Preferably, at the opposite side to one end of the base part, a projection projecting from the bending-vibration piece is provided, or at least a pair of resonant arms resonating with vibration of the base part, said pair of resonant arms projecting from the fixing part are provided. Thanks to this, it has been possible to detect a turning angular rate in a sufficiently high accuracy without providing a projection which has a certain weight and extends from the vibrator toward the axis of turning even in case of arranging the vibrator so that the vibration arm of the vibrator extends perpendicularly to the axis of turning.

Abstract: A vibratory gyroscope for detecting a turning angular rate in a turning system is provided. The gyroscope comprises a vibrator, an exciting means for exciting driving vibration in the vibrator, and a detecting means for detecting vibration induced in the vibrator. The vibrator comprises a plurality of vibration systems 1A, 1B, 2A and 2B, which are formed within a specified plane intersecting the turning axis Z. Vibration systems comprises first vibration systems 1A and 1B whose vibrations include radial vibration components, in which the center of gravity of first vibration system vibrates in a radial direction in the specified plane with respect to the center of gravity GO of the vibrator. The vibration systems also comprises second vibration systems 2A and 2B whose vibrations include circumferential vibration components, in which the center of gravity of vibration of the second vibration system vibrates in the specified plane along a circle with the center of gravity GO as its center.

Abstract: A vibratory gyroscope for detecting a turning angular rate in a turning system is provided. The gyroscope comprises a vibrator, an exciting means for exciting driving vibration in the vibrator, and a detecting means for detecting vibration induced in the vibrator. The vibrator comprises a plurality of vibration systems 1A, 1B, 2A and 2B, which are formed within a specified plane intersecting the turning axis Z. Vibration systems comprises first vibration systems 1A and 1B whose vibrations include radial vibration components, in which the center of gravity of first vibration system vibrates in a radial direction in the specified plane with respect to the center of gravity GO of the vibrator. The vibration systems also comprises second vibration systems 2A and 2B whose vibrations include circumferential vibration components, in which the center of gravity of vibration of the second vibration system vibrates in the specified plane along a circle with the center of gravity GO as its center.

Abstract: A vibrator including a loop-shaped vibration system 2, another vibration system 3A, 5A and 5B vibrating independently from the system 2, and connecting portions 4A and 4B. Exciting means for exciting driving vibration in the vibrator is provided in one of the loop-shaped vibration system and another vibration system, and detecting means for detecting detection vibration induced in the vibrator, when it is turned, is provided in the other of the systems, to provide a vibratory gyroscope.

Abstract: A vibratory gyroscope for detecting a turning angular rate of rotation applied to a vibrator, which vibratory gyroscope has the vibrator provided with a plurality of vibration pieces and a base part having the plurality of vibration pieces connected with it and is composed so as to obtain the turning angular rate on the basis of a detecting vibration excited in the vibrator according to the turning angular rate when giving a driving vibration to at least one of the vibration pieces, and makes the vibrator being supported in a domain where the detecting vibration is smallest in said vibrator, said domain being in the vicinity of the center of gravity of the vibrator.

Abstract: An optical transmission member-fixed assembly including a substrate with a receipt groove in which a core wire of an optical transmission member is received, a lid integrated with the substrate, while between the substrate and the lid is provided a receipt space in which at least a covering of the optical transmission member is received, a dimension of the receipt space being greater than that of the receipt groove when viewed in a width direction, wherein an adhesive is filled around the core wire inside the receipt groove for fixing the core wire there, an adhesive is filled around the optical transmission member within the receipt space for fixing the optical transmission member there, a thickness of the adhesive filled around the optical transmission member inside a boundary space zone between the receipt space and the receipt groove is continuously reduced as a location of the boundary space zone is at least near and goes to an opening of the receipt groove at an end opposed to the receipt space.