Abstract: There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

Abstract: There is provided an electron microscope capable of recording images in a shorter time. The electron microscope (100) includes: an illumination system (4) for illuminating a sample (S) with an electron beam; an imaging system (6) for focusing electrons transmitted through the sample (S); an electron deflector (24) for deflecting the electrons transmitted through the sample (S); an imager (28) having a photosensitive surface (29) for detecting the electrons transmitted through the sample (S), the imager (28) being operative to record focused images formed by the electrons transmitted through the sample (S); and a controller (30) for controlling the electron deflector (24) such that an active electron incident region (2) of the photosensitive surface (29) currently hit by the beam is varied in response to variations in illumination conditions of the illumination system (4).

Abstract: In a transmission electron microscope, an electron beam flux of a cross section constricted conically over a reference specimen is made to hit the reference specimen. The flux includes electron beams hitting the specimen at incident angles which spread conically in the direction of irradiation. The beams are focused onto a fluorescent screen at positions which are different in distance from the center according to the incident angles. A transmission image of the beam flux is gained. A Fourier transform is performed for each of inspection regions set on the transmission image. Aberration coefficients C1, C2, . . . , Ci are calculated from the obtained, Fourier-transformed images by image processing. Aberration in the imaging lenses is corrected. Consequently, the aberration can be corrected by finding the aberration coefficients C1, C2, . . . , Ci from only one transmission image. The number of transmission images or the acquisition time is reduced.

Abstract: In a transmission electron microscope, an electron beam flux of a cross section constricted conically over a reference specimen is made to hit the reference specimen. The flux includes electron beams hitting the specimen at incident angles which spread conically in the direction of irradiation. The beams are focused onto a fluorescent screen at positions which are different in distance from the center according to the incident angles. A transmission image of the beam flux is gained. A Fourier transform is performed for each of inspection regions set on the transmission image. Aberration coefficients C1, C2, . . . , Ci are calculated from the obtained, Fourier-transformed images by image processing. Aberration in the imaging lenses is corrected. Consequently, the aberration can be corrected by finding the aberration coefficients C1, C2, . . . , Ci from only one transmission image. The number of transmission images or the acquisition time is reduced.

Abstract: An electron microscope which permits an operator to perform astigmatic correction and beam alignment. A field of view capable of clearly displaying astigmatism or beam misalignment in terms of a Ronchigram is placed on the optical axis. Then, the operator selects a Ronchigram display mode. A first or second TV camera such as a CCD camera is selected and placed on the optical axis while maintaining the electron optics in the STEM imaging mode. Under this condition, a Ronchigram signal is obtained from the TV camera and supplied to a computer via a TV power supply and an interface. As a result, a Ronchigram of appropriate size and brightness is displayed in an image display region on a display device. The operator corrects astigmatism or adjusts the alignment while observing the Ronchigram.

Abstract: An electron microscope which permits an operator to perform astigmatic correction and beam alignment. A field of view capable of clearly displaying astigmatism or beam misalignment in terms of a Ronchigram is placed on the optical axis. Then, the operator selects a Ronchigram display mode. A first or second TV camera such as a CCD camera is selected and placed on the optical axis while maintaining the electron optics in the STEM imaging mode. Under this condition, a Ronchigram signal is obtained from the TV camera and supplied to a computer via a TV power supply and an interface. As a result, a Ronchigram of appropriate size and brightness is displayed in an image display region on a display device. The operator corrects astigmatism or adjusts the alignment while observing the Ronchigram.

Abstract: A combined electron microscope capable of making SEM/STEM images and TEM image correspond to each other precisely. Angles of rotation of SEM/STEM images for matching TEM images to the angles of rotation of the SEM/STEM images, magnifications in TEM, and current values to be supplied into the imaging lenses are stored in a first memory. The magnifications of TEM images and angles of rotation for matching SEM/STEM images to the angles of rotation of TEM images are stored in the second memory. The image or images corrected by the computer are displayed on the display device.

Abstract: A combined electron microscope capable of making SEM/STEM images and TEM image correspond to each other precisely. Angles of rotation of SEM/STEM images for matching TEM images to the angles of rotation of the SEM/STEM images, magnifications in TEM, and current values to be supplied into the imaging lenses are stored in a first memory. The magnifications of TEM images and angles of rotation for matching SEM/STEM images to the angles of rotation of TEM images are stored in the second memory. The image or images corrected by the computer are displayed on the display device.

Abstract: The present invention is to provide a microscopic system by which a simultaneous observation at an ultra high vacuum condition by an electron microscope and by a scanning probe microscope is possible in an ultra high vacuum electron microscope chamber 9 equipped with an observation stage 3, to which an ultra high vacuum chamber 1 for a scanning probe microscope equipping with a scanning probe microscope holder 2 in which scanning probe microscope is contained and a specimen treatment chamber 5 possessing a specimen holder 4 on which a specimen is held are connected. Said each chamber of microscopic system can be separately exhausted to the ultra high vacuum level and the specimen holder and the scanning probe microscope holder can voluntarily be fixed to said observation stage and be removed from said observation stage.

Abstract: A device for replacing an electron microscope specimen. The device moves a specimen holder from inside the atmosphere onto a specimen stage via a preliminary chamber, the stage being installed in the specimen chamber of the microscope. The device comprises a valve partitioning the preliminary chamber from the specimen chamber, a movable cylinder capable of being moved through the preliminary chamber into the specimen chamber, a hermetic seal, and a lead wire connecting the specimen holder with a terminal. The cylinder has a cover at its front end. The terminal extends through the cover and is insulated from it. A specimen insertion rod is held by a mechanism mounted in the cover. When the cylinder is inserted close to the partition valve, the hermetic seal maintains the specimen chamber airtight.

Abstract: A transmission electron microscope capable of operating in photoelectron emission microscopy mode as well as in transmission electron microscopy mode. A negative voltage is applied to a specimen placed between the magnetic pole pieces of the objective lens. In the photoelectron emission microscopy mode, the specimen is irradiated with exciting rays to induce photoelectrons from the rear surface of the specimen. The exciting rays can be soft x-rays or ultraviolet rays produced from a high-pressure mercury lamp. The soft x-rays can be produced by directing the electron beam emitted from the electron gun of the microscope either onto the specimen or onto one or more targets placed over the specimen.

Abstract: A method for large-angle convergent-beam diffraction comprises selecting a portion of the diffraction pattern formed by an objective lens, by the use of a diaphragm. Then, a portion of the electron micrograph which is formed by the electron beam passed through the diaphragm is detected, thus producing a signal. This enables a large-angle convergent-beam electron diffraction method that permits one to examine a specimen region which is much narrower than conventional.