Abstract: An infrared confocal scanning microscope includes a light source unit, which emits a beam of infrared light, an objective lens, which converges the beam of infrared light from the light source unit to form a light spot inside the sample, a scanning mechanism, which two-dimensionally scans the light spot in a plane perpendicular to an optical axis, and a photodetector. The photodetector includes a micro light receiving region, which is in a confocal positional relation with respect to the light spot, and constitutes a substantial micro opening.

Abstract: The laser beam emitted from a laser diode is applied to a sample, thereby measuring the height of the sample in accordance with the principle of trigonometrical measurement. A line-sensor camera acquires a dark-field image of the sample by using a ring-shaped illumination device, and a bright-field image of the sample by using a light source. The luminance-image data items representing the dark-field image and the bright-field image, respectively, are input to a controller. The position of the sample and the defects in the sample can thereby be detected. The position can be detected and the height can be measured, with high accuracy. This greatly relieves inspectors.