Patents by Inventor Yukinobu Hibino

Yukinobu Hibino has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for gas phase synthesis
    Patent number: 5276503
    Abstract: A method of gas phase synthesis including the steps of measuring, by ellipsometry, optical properties of a surface of a sample on which a film is formed during formation of the film, and of evaluating the density of nucleation from changes in ellipsometric parameter angles during formation of of the film.
    Type: Grant
    Filed: October 31, 1991
    Date of Patent: January 4, 1994
    Assignee: Ninon Shinku Gijutsu Kabushiki Kaisha
    Inventors: Yasuaki Hayashi, Yukinobu Hibino