Abstract: An oil strainer is provided with a tube (41) for allowing oil to flow therethrough, a mesh (71) mounted to one end (41m) of the tube (41), a protector (61) connected to said end (41m) of the tube (41) so as to cover the mesh (71), and a bracket (51) for fixing the tube (41) to a surrounding member mounted around the oil strainer (31). The bracket (51) has a staking section (53) for staking the protector (61) and the tube (41) together. The above structure enhances productivity of the oil strainer and reduces costs of the oil strainer.

Abstract: A hybrid transaxle 200 that is a transmission is provided with a junction surface 20 that contacts a junction surface of an internal combustion engine. A bolt span portion 20a of the junction surface 20 is provided with a protrusion portion 25 that elastically deforms so that the internal combustion engine-side junction surface and the hybrid transaxle 200-side junction surface 20 closely contact each other.

Abstract: An optical device includes a rotary member. A rotary member is rotated across a first angle range and a second angle range lined up in a direction in which an angle is increased. An activator activates a power source when a rotation angle of the rotary member is increased to a first specific angle belonging to the first angle range. An adjuster adjusts a setting of an optical system with reference to a rotation of the rotary member in the second angle range. A notifier generates a notification when the rotation angle of the rotary member remains within the first angle range in a state where the power source is activated.

Abstract: A hybrid transaxle 200 that is a transmission is provided with a junction surface 20 that contacts a junction surface of an internal combustion engine. A bolt span portion 20a of the junction surface 20 is provided with a protrusion portion 25 that elastically deforms so that the internal combustion engine-side junction surface and the hybrid transaxle 200-side junction surface 20 closely contact each other.

Abstract: An oil strainer is provided with a tube (41) for allowing oil to flow therethrough, a mesh (71) mounted to one end (41m) of the tube (41), a protector (61) connected to said end (41m) of the tube (41) so as to cover the mesh (71), and a bracket (51) for fixing the tube (41) to a surrounding member mounted around the oil strainer (31). The bracket (51) has a staking section (53) for staking the protector (61) and the tube (41) together. The above structure enhances productivity of the oil strainer and reduces costs of the oil strainer.

Abstract: Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks.

Abstract: A cleaning apparatus (30) is connected to a treating chamber (12) of a CVD apparatus (10) for forming a silicon film. The cleaning apparatus (30) has a first, a second, and a third gas sources (32, 34, 36) and a chlorine gas, a fluorine gas, and an inert gas are introduced from the gas sources through FMC (38a, 38b, 38c), respectively, with flow rates controlled independently from one another. Those gases are gathered at a pipe (42) and mixed into a mixed gas. The mixed gas is passed through a heated reactor (44) such as a heat exchanger to thereby react the chlorine gas with the fluorine gas and form a formed gas containing fluorinated chlorine gas such as CIF3. The formed gas is supplied to the treating chamber (12) through a cooler (46), an analyzer (48) and a buffer (54).

Abstract: Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks.

Abstract: The present invention relates to a temperature regulation apparatus capable of easily regulating the temperature of a support for a substance to be treated, such as a semiconductor wafer.The temperature regulation apparatus includes a liquid nitrogen supply device for supplying liquid nitrogen into a temperature regulation space provided in the inside of a support so as to effect flashing of the liquid nitrogen. A heating device for heating the support and temperature sensors for detecting the temperature of the support are also provided. A temperature setting device sets the temperature of the support at a desired temperature and a controller controls the liquid nitrogen supply device and the heating device based on a temperature detected by the temperature sensors, so that the support reaches and is maintained at the set temperature.

Abstract: A layout designing apparatus for circuit boards including a mother board and a substrate which comprises a layout data storage unit for having areas to store data; an operation unit for giving directions; a mother board setting unit for creating the data about the mother board in the layout data storage unit according to the operation unit; a substrate placement unit for creating the data in the layout data storage unit according to the operation unit so that the substrate of a given configuration is placed on a given place on the mother board; a component placement unit for creating the data in the layout data storage unit according to the operation unit so that components of given configurations are placed on given places on the mother board and on the substrate; a routing unit for creating the data in the layout data storage unit according to the operation unit so that routing paths of given configurations are laid out on the mother board and on the substrate; a display unit; and a layout data display cont

Abstract: A refrigerating unit comprising an adiabatic box provided with a door to its opening, a machine compartment in contact with said adiabatic box, and a refrigerating cycle wherein the machine compartment is covered with a damping plate and is attached to the adiabatic box with a jointing means so as to be sealed, and further said refrigerating unit comprises an oil cooler for cooling lubricating oil in a compressor in the refrigerating cycle is provided. By this, noise and vibration generated by a refrigerator itself such as noise generated by a flowing or boiling refrigerant in the compressor and an evaporator can be effectively removed, noise and vibration generated by resonance between vibration by a refrigerator and a wall or a cabinet can be attenuated and the effect of heat release can be enhanced.

Abstract: According to the present invention, a piping installation for supplying a low temperature fluid such as liquid nitrogen from a main pipe (17) of transporting the low temperature fluid to predetermined equipments (2, 4, 6), for example a cooling apparatus, by way of branch pipes (18, 19), is characterized in that a thermally insulated pipe having a small outer diameter is used for the branch pipes (18, 19). By reducing the diameter of the branch pipes (18, 19) of the piping installation, the occupation of them in a space can be reduced, whereby spaces (3, 5) where they are installed can be effectively utilized. By reducing the diameter of the branch pipes (18, 19), furthermore, the quantity of the low temperature fluid which has been hitherto discharged wastefully can be decreased.

Abstract: A first MFC 10 and a second MFC 10A are disposed respectively on a silane gas feed line 5 and an inert gas or other dilution gas feed line 19 for feeding a gas for semiconductors such as silane gas or an inert gas or other dilution gas to a mixing chamber 13. A buffer tank 21 is provided which restrains or relieves the pressure energy of the mixed gas coming from the mixing chamber 13 and supplies the same mixed gas to each of a plurality of semiconductor manufacturing units 4 separately. The first MFC 10 and second MFC 10A are actuated to open or close on the basis of an increase or decrease in the pressure value of the mixed gas stored in the buffer tank 21, thereby stopping or starting the feed of the silane gas and the inert gas or other dilution gas again.

Abstract: In a refrigerator, the inner space of a heat insulated housing is divided to form a refrigerating compartment, a freezer compartment, and a vegetable compartment. A projection which contacts with the back of a cooler cover and divides the space behind the cooler cover into two chambers arranged in a lateral direction is formed on a back wall portion. The space enclosed by the projection, the cooler cover, and the housing is formed as a cold air passage for guiding cold air of the refrigerating compartment to the vegetable compartment. A damper device has a shutter plate, a bias spring which urges the shutter plate toward a cold air duct, and a shape memorizing alloy coil spring on which a heater is wound. A weak current is always supplied from a damper control device to the heater so that the temperature of the shape memorizing alloy coil spring is maintained at the Ms point (martensite phase transition start temperature) or higher under the state where the shutter plate is lifted up.

Abstract: This data processor makes zero the execution clock count of a branch instruction, a compare instruction, or a compare instruction and following branch instruction when a series of instructions executed in the past is again executed. The data processor of this invention is provided with a history storage unit which stores as its address tag the address of an instruction executed before the branch instruction or compare instruction, and stores the address of an instruction to be executed next the branch or compare instruction or both instruction code of an instruction to be executed next the branch or compare instruction and an address used for pre-fetching an instruction following the instruction code. While the instruction before the branch or compare instruction is decoded, the history storage unit is searched to obtain an instruction to be next executed. The obtained instruction is executed immediately after the execution of the instruction immediately before the branch or compare instruction.

Abstract: A method is disclosed which avoids the formation of droplets by condensation of vapors during the expansion of a highly compressed gas through a critical orifice.The pressure drop is distributed over a sufficient number of critical orifices so as to limit the temperature drop insufficient to initiate droplet formation.One application of the method is pressure reduction of cylinder gases without droplet formation.