Patents by Inventor Yukinori Aida

Yukinori Aida has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11754388
    Abstract: A height measuring device includes a light source that emits light in a direction oblique to a top surface of a specimen, a slit that shapes the light from the light source to form a slit image on the specimen, an imaging element that detects reflected light reflected by the specimen, and an arithmetic unit. The arithmetic unit: identifies a slit image of the reflected light reflected by the top surface of the specimen from among a plurality of slit images based on respective positions of the plurality of slit images on a detection surface of the imaging element; and determines the height of the top surface of the specimen based on the position of the slit image of the reflected light reflected by the top surface of the specimen on the detection surface.
    Type: Grant
    Filed: January 4, 2021
    Date of Patent: September 12, 2023
    Assignee: JEOL Ltd.
    Inventor: Yukinori Aida
  • Publication number: 20230075825
    Abstract: Provided is a charged particle beam drawing apparatus including a measurement unit that scans a reference mark disposed on a stage with a charged particle beam to detect a position of the reference mark, and measures a positional deviation amount of the charged particle beam, based on the detected position; and a positional correction unit that corrects a drawing position based on the measured positional deviation amount. A plurality of the reference marks is disposed on the stage, and the measurement unit switches from one of the reference marks used for the measurement of the positional deviation amount to another one of the reference marks that is not used yet, when a predetermined condition has been satisfied.
    Type: Application
    Filed: September 7, 2022
    Publication date: March 9, 2023
    Inventor: Yukinori Aida
  • Publication number: 20210207945
    Abstract: A height measuring device includes a light source that emits light in a direction oblique to a top surface of a specimen, a slit that shapes the light from the light source to form a slit image on the specimen, an imaging element that detects reflected light reflected by the specimen, and an arithmetic unit. The arithmetic unit: identifies a slit image of the reflected light reflected by the top surface of the specimen from among a plurality of slit images based on respective positions of the plurality of slit images on a detection surface of the imaging element; and determines the height of the top surface of the specimen based on the position of the slit image of the reflected light reflected by the top surface of the specimen on the detection surface.
    Type: Application
    Filed: January 4, 2021
    Publication date: July 8, 2021
    Inventor: Yukinori Aida