Patents by Inventor Yukio Hoshi

Yukio Hoshi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10610906
    Abstract: The present invention provides a method for manufacturing a resist composition which is used in a manufacturing process of a semiconductor apparatus, comprising the steps of: cleaning a manufacturing apparatus for the resist composition with a cleaning solution; analyzing the cleaning solution taken out from the manufacturing apparatus; repeating the step of cleaning and the step of analyzing until a concentration of a nonvolatile component(s) contained in the cleaning solution became 10 ppm or less; and manufacturing the resist composition by using the manufacturing apparatus after the step of repeating. There can be provided a method for manufacturing a resist composition which can manufacture a resist composition lowered in coating defects.
    Type: Grant
    Filed: August 11, 2014
    Date of Patent: April 7, 2020
    Assignee: SHIN-ETSU CHEMICAL CO., LTD.
    Inventors: Motoaki Iwabuchi, Tsutomu Ogihara, Yukio Hoshi, Yusuke Biyajima
  • Publication number: 20150099216
    Abstract: The present invention provides a method for manufacturing a resist composition which is used in a manufacturing process of a semiconductor apparatus, comprising the steps of: cleaning a manufacturing apparatus for the resist composition with a cleaning solution; analyzing the cleaning solution taken out from the manufacturing apparatus; repeating the step of cleaning and the step of analyzing until a concentration of a nonvolatile component(s) contained in the cleaning solution became 10 ppm or less; and manufacturing the resist composition by using the manufacturing apparatus after the step of repeating. There can be provided a method for manufacturing a resist composition which can manufacture a resist composition lowered in coating defects.
    Type: Application
    Filed: August 11, 2014
    Publication date: April 9, 2015
    Inventors: Motoaki IWABUCHI, Tsutomu OGIHARA, Yukio HOSHI, Yusuke BIYAJIMA
  • Patent number: 7113952
    Abstract: A computer-implemented method and system for processing a document such as a structured document in which information such as a term, name and belonging department is used as shared information and word consistency or modification can be automatically and easily reflected on all documents.
    Type: Grant
    Filed: August 28, 2003
    Date of Patent: September 26, 2006
    Assignee: Hitachi, Ltd.
    Inventors: Yuki Aoyama, Yukie Takita, Toru Takahashi, Yukio Hoshi
  • Publication number: 20040049626
    Abstract: A computer-implemented method and system for processing a document such as a structured document in which information such as a term, name and belonging department is used as shared information and word consistency or modification can be automatically and easily reflected on all documents. In the document processing method, a shared information editing program edits shared information shared information frequently described in a plurality of documents, a shared information storage program stores the edited shared information in a secondary memory, a shared information list-up program lists up the shared information for each information type, a structured document editing program edits a structured document to describe a link to the shared information selected from the edited shared information listed up, a structured document storage program stores the structured document in the secondary.
    Type: Application
    Filed: August 28, 2003
    Publication date: March 11, 2004
    Applicant: Hitachi, Ltd.
    Inventors: Yuki Aoyama, Yukie Takita, Toru Takahashi, Yukio Hoshi
  • Patent number: 6651069
    Abstract: A computer-implemented method and system for processing a document such as a structured document in which information such as a term, name and belonging department is used as shared information and word consistency or modification can be automatically and easily reflected on all documents.
    Type: Grant
    Filed: January 22, 2002
    Date of Patent: November 18, 2003
    Assignee: Hitachi, Ltd.
    Inventors: Yuki Aoyama, Yukie Takita, Toru Takahashi, Yukio Hoshi
  • Publication number: 20020073093
    Abstract: A computer-implemented method and system for processing a document such as a structured document in which information such as a term, name and belonging department is used as shared information and word consistency or modification can be automatically and easily reflected on all documents.
    Type: Application
    Filed: January 22, 2002
    Publication date: June 13, 2002
    Applicant: Hitachi, Ltd.
    Inventors: Yuki Aoyama, Yukie Takita, Toru Takahashi, Yukio Hoshi
  • Patent number: 6349302
    Abstract: A computer-implemented method and system for processing a document such as a structured document in which information such as a term, name and belonging department is used as shared information and word consistency or modification can be automatically and easily reflected on all documents.
    Type: Grant
    Filed: July 7, 1998
    Date of Patent: February 19, 2002
    Assignee: Hitachi, Ltd.
    Inventors: Yuki Aoyama, Yukie Takita, Toru Takahashi, Yukio Hoshi
  • Publication number: 20010027554
    Abstract: A table of a manual for xx product (1st edition) includes component names, file names, version up mode and version numbers of a project. When the version up mode is a fixed mode, a version number in the table is fixed, while in an auto-changing mode components are edited and when a new version is prepared, a version number is updated. Versions V2 and V1 of a table of contents, versions V2 and V1 of a first chapter and the like show registered states in version information management tables. Table of contents of up to V2 is prepared, while since it is set to a fixed mode in the table, V1 thereof is fixed. In case of first chapter, when V2 thereof is prepared, it is updated to V2 in the table since it is set to auto-changing mode and the version number thereof is updated each time a new version is prepared until it is changed to a fixed mode.
    Type: Application
    Filed: May 14, 2001
    Publication date: October 4, 2001
    Inventors: Makoto Imachi, Toru Takahashi, Yuki Aoyama, Yukio Hoshi
  • Patent number: 6272678
    Abstract: A table of a manual for xx product (1st edition) includes component names, file names, version up mode and version numbers of a project. When the version up mode is a fixed mode, a version number in the table is fixed, while in an auto-changing mode components are edited and when a new version is prepared, a version number is updated. Versions V2 and V1 of a table of contents, versions V2 and V1 of a first chapter and the like show registered states in version information management tables. Table of contents of up to V2 is prepared, while since it is set to a fixed mode in the table, V1 thereof is fixed. In case of first chapter, when V2 thereof is prepared, it is updated to V2 in the table since it is set to auto-changing mode and the version number thereof is updated each time a new version is prepared until it is changed to a fixed mode.
    Type: Grant
    Filed: November 4, 1998
    Date of Patent: August 7, 2001
    Assignee: Hitachi, LTD
    Inventors: Makoto Imachi, Toru Takahashi, Yuki Aoyama, Yukio Hoshi