Abstract: This invention provides a method which makes it possible to reliably detect malfunctions during the ejecting step without rendering the injection molding machine more complicated. An ejector pin is incorporated in the movable die. This ejector pin is connected, via an ejector plate, a connecting rod, a connecting plate and a feed screw, with a servo motor. The force for ejecting the ejector pin pushing a molded product is measured from the driving torque of a servo motor. In this invention, the relationship between driving torque and elapsed time from the initiation of ejection of the molded product is stored as a reference pattern. The tolerance limit and monitoring interval of driving torque are preset relative to the reference pattern. When the value of driving torque falls outside the tolerance limit during the ejecting step, it is judged as a malfunction, and an alarm is generated to stop the machine in a safe state.

Abstract: An electric injection molding machine capable of maintaining a quality of molded articles and capable of minimizing weight variation of molded articles. An electric injection mechanism injects molding material into a mold using an electric motor. An injection control unit and a servo driver control the motor so as to follow an injection speed reference. A compensation unit compensates the injection speed reference based on characteristics of a hydraulic drive system so that fluctuation of injection speed with respect to the injection pressure approximate the fluctuation characteristics of a hydraulic injection mechanism.

Abstract: This invention provides a method which makes it possible to reliably detect malfunctions during the ejecting step without rendering the injection molding machine more complicated. An ejector pin is incorporated in the movable die. This ejector pin is connected, via an ejector plate, a connecting rod, a connecting plate and a feed screw, with a servo motor. The force for ejecting the ejector pin pushing a molded product is measured from the driving torque of a servo motor. In this invention, the relationship between driving torque and elapsed time from the initiation of ejection of the molded product is stored as a reference pattern. The tolerance limit and monitoring interval of driving torque are preset relative to the reference pattern. When the value of driving torque falls outside the tolerance limit during the ejecting step, it is judged as a malfunction, and an alarm is generated to stop the machine in a safe state.

Abstract: Method for mold clamping of the present invention is capable of shortening a molding cycle without any initial setting works for an engaging position of a tie bars. The method is constituted the steps of moving the tie bars in the direction of mold closing during mold close operation, judging a relative moving speed between a movable die plate and the tie bar to be within a predetermined value, engaging the tie bars with the movable die plate mechanically by operating an engaging means when the relative moving speed is judged to be within the value, then further moving the movable die plate against a fixed die plate under engagement, and after contact of a movable mold with a fixed mold driving a mold clamping cylinder, thereby executing mold clamping operation.

Abstract: A filling step control method of an injection molding machine for filling a molten resin into a die cavity is provided. The control method has the steps of: sampling in initiating the filling step for filling the molten resin into the die cavity by controlling an injection speed and, thereafter, by controlling a filling pressure while not exceeding a predetermined value; storing the injection speed over an entire filling process when a quality product can be stably obtained during the sampling step into a storage medium as a reference waveform; and after storing the reference waveform, molding for filling the molten resin into the die cavity by controlling the injection speed to follow the reference waveform over the entire filling step.

Abstract: The retreat completion position of the screw in the charging step in actual production is controlled based on the result in pilot production as follows. In pilot production, the measurement value Ts of the screw driving torque is integrated with respect to the screw position P from the forward limit to the retreat completion position Ps. When conforming item is produced in the pilot production, the value &Sgr;Ts·dP obtained as a result of the integration is stored as a reference value. After actual production begins, the measurement value Tx of the screw driving torque is integrated in real time with respect to the screw position P from the forward limit to the screw position at each time. The obtained value &Sgr;Tx·dP is monitored. When this value &Sgr;Tx·dP coincides with the reference value &Sgr;Ts·dP, it is determined that the charging step has been completed, and the retreat operation of the screw is stopped.

Abstract: A wireless suspension blank is made using a two-layer laminate composed of a metallic layer with the spring property and an electrically insulating layer. The first method includes a first step for working the metallic layer by the photo etching method, a second step for forming a wiring part on the insulating layer by the semi-additive method and a third step for working the insulating layer by the wet-etching method. The second method includes a first step for working the metallic layer by the photo etching method, a second step for forming a wiring part on the insulating layer by the semi-additive method and a third step for working the insulating layer by the plasma etching method. The third method includes a first step for forming a wiring part on the metallic layer by the semi-additive method, a second step for working the metallic layer by the wet-etching method and a third step for working the insulating layer by the dry-etching method or the wet-etching method.

Abstract: An electric injection molding machine capable of maintaining a quality of molded articles and capable of suppressing a variation of weight of articles molded by a mold having a plurality of cavities when transferring molding conditions in a hydraulic injection molding machine as they are to the electric injection molding machine.

Abstract: This invention provides a method which makes it possible to reliably detect malfunctions during the ejecting step without rendering the injection molding machine more complicated. An ejector pin is incorporated in the movable die. This ejector pin is connected, via an ejector plate, a connecting rod, a connecting plate and a feed screw, with a servo motor. The force for ejecting the ejector pin pushing a molded product is measured from the driving torque of a servo motor. In this invention, the relationship between driving torque and elapsed time from the initiation of ejection of the molded product is stored as a reference pattern. The tolerance limit and monitoring interval of driving torque are preset relative to the reference pattern. When the value of driving torque falls outside the tolerance limit during the ejecting step, it is judged as a malfunction, and an alarm is generated to stop the machine in a safe state.

Abstract: The object of this invention is to suppress the generation of surge pressure at the moment of shifting from the filling step to the holding step, thereby ensuring the stabilization in quality of molded products. In the filling step, the screw is advanced from the charging finish point at a predetermined speed while renewing the positioning command at time intervals. Simultaneously, the position of screw is monitored to see if it has reached the holding initiating point. When the screw has reached the holding initiating point, the holding step is initiated, and the next positioning command is switched from the present positioning command into one wherein a predetermined value of correction is added to the present positioning command, thereby decelerating (or moving back) the screw. After shifted to the holding step, the position of screw is controlled while renewing the positioning command at time intervals.

Abstract: An injection unit including a heating barrel and an injection screw rotationally and axially movable and placed in the heating barrel is disposed on one side of a clamping mechanism for clamping a mold. The injection screw is driven and controlled for operation through a ball screw by an electric motor. Products, each of a moving speed of the ball screw and an operating current supplied to the electric motor in a unit time, are accumulated to calculate a total energy value indicating the amount of total energy supplied to the ball screw. A life energy value is predetermined on the basis of products, each of force generated by the ball screw and a moving speed of the ball screw. It is decided that a life of the ball screw has terminated when the total energy value A is equal to or greater than the life energy B (A≧B).

Abstract: The retreat completion position of the screw in the charging step in actual production is controlled based on the result in pilot production as follows. In pilot production, the measurement value Ts of the screw driving torque is integrated with respect to the screw position P from the forward limit to the retreat completion position Ps. When conforming item is produced in the pilot production, the value &Sgr;Ts·dP obtained as a result of the integration is stored as a reference value. After actual production begins, the measurement value Tx of the screw driving torque is integrated in real time with respect to the screw position P from the forward limit to the screw position at each time. The obtained value &Sgr;Tx·dP is monitored. When this value &Sgr;Tx·dP coincides with the reference value &Sgr;Ts·dP, it is determined that the charging step has been completed, and the retreat operation of the screw is stopped.

Abstract: The duty of a current to be supplied to an injection motor is calculated on the basis of the ratio between set injection time for which the injection motor operates and molding cycle time, a shaft torque of the injection motor is calculated on the basis of a set maximum injection force of the injection molding condition, a maximum current for the injection motor is determined on the basis of the calculated shaft torque, and it is decided that the injection motor is overloaded, an alarm is given, a duty for a current that enables continuous molding is retrieved for the maximum current, a state that enables continuous molding is displayed and the molding cycle time determining the duty of the current that enables continuous molding is corrected when the current having the calculated desired duty is smaller than the maximum current.

Abstract: The invention relates a halftone phase shift photomask and a blank therefor, which enables the transmittance of a phase shift portion to be varied even after blank or photomask fabrication, can accommodate to a variety of patterns, and can be fabricated on a mass scale. The exposure light transmittance of a halftone phase shift layer is arbitrarily variable within the range of 1% to 50%, inclusive, by exposing the blank or photomask to a high temperature elevated to at least 150.degree. C., to an oxidizing atmosphere, or to a reducing atmosphere at a step that can provided independent of the steps for film-forming or photomask fabrication step. This enables the exposure light transmittance of the halftone phase shift layer to be changed to any desired value after blank or photomask fabrication, and so an optimal halftone phase shift photomask to be obtained depending on the size, area, location, shape, and the like of the transferred pattern.

Abstract: The invention relates to a phase shift photomask in which the peripheral region portion of a phase shift layer is removed by a relatively simple procedure and which has no or little defect and is inexpensive, a blank therefor, and a process for fabricating them. The process includes the steps of forming phase shift layer 23 all over the surface of one side of transparent substrate 21, and immersing only the peripheral region of substrate 21 in etching solution 25 to etch away the peripheral region of phase shift layer 23, whereby phase shift layer 27 is confined within an area smaller than that of substrate 21.

Abstract: The invention relates a halftone phase shift photomask and a blank therefor, which enables the transmittance of a phase shift portion to be varied even after blank or photomask fabrication, can accommodate to a variety of patterns, and can be fabricated on a mass scale. The exposure light transmittance of a halftone phase shift layer is arbitrarily variable within the range of 1% to 50%, inclusive, by exposing the blank or photomask to a high temperature elevated to at least 150.degree. C., to an oxidizing atmosphere, or to a reducing atmosphere at a step that can provided independent of the steps for film-forming or photomask fabrication step. This enables the exposure light transmittance of the halftone phase shift layer to be changed to any desired value after blank or photomask fabrication, and so an optimal halftone phase shift photomask to be obtained depending on the size, area, location, shape, and the like of the transferred pattern.

Abstract: A chromium blank for forming a black matrix-screen to be used as a color filter for a liquid crystal display is formed by forming at least a first antireflection film, a second antireflection film and a screening film sequentially in that order on one major surface of a transparent substrate. Each of the first and the second antireflection film is a semitransparent film formed of a chromium compound or a chromium mixture, containing chromium as a principal component, and the screening film is formed of chromium, a chromium compound containing chromium as a principal component. The transparent substrate, the first antireflection film, the second antireflection film and the screening film meet an inequality: n.sub.s <n.sub.1 <n.sub.2 <n.sub.3, where n.sub.s is the refractive index of the transparent substrate, n.sub.1 is the real part of the complex index of refraction of the first antireflection film, n.sub.2 is the real part of the complex index of refraction of the second antireflection film, and n.

Abstract: A halftone phase shift photomask designed so that it is possible to shorten the photoengraving process, use a production line for a conventional photomask, prevent lowering of the contract between the transparent and semitransparent regions at a long wavelength in the visible region, which is used for inspection and measurement, and also prevent charge-up during electron beam exposure, and that ordinary physical cleaning process can be used for the halftone phase shift photomask. The halftone phase shift photomask has on a transparent substrate (1) a region which is semitransparent to exposure light and a region which is transparent to the exposure light so that the phase difference between light passing through the transparent region and light passing through the semitransparent region is substantially .pi. radians. A semitransparent film that constitutes the semitransparent region is arranged in the form of a multilayer film including layers (3, 4) of chromium or a chromium compound.

Abstract: A phase shift photomask and a photomask blank used to produce the same. A dry etching stopper layer, which is disposed between a substrate and a light-shielding layer or between the substrate and a phase shifter layer, is made of either a film mainly composed of tin oxide nitride, which has high etching selectivity and high permeability, or an alumina film formed by sputtering, followed by heat treatment carried out in an oxidizing atmosphere, thereby enabling the required overetching to be satisfactorily performed during etching of the phase shifter layer, and thus making it possible to effect precise phase control. In addition, it is possible to eliminate the occurrence of an in-plane transmittance distribution.