Abstract: An apparatus for the attitude control of a plate-form body such as mask or wafer comprises a supporting table, a first movable stage placed on the table and a second movable stage placed on the first stage. The second movable stage is provided means for holding the plate-form body on a reference plane containing the origin of the coordinates defined by two orthogonal coordinate axes. Between the supporting table and the first movable stage there is disposed first driving means. The first driving means is disposed for displacing the first movable stage at at least two positions opposed to each other relative to one of the coordinate axes. The displacement is produced in the direction substantially normal to a segment passing through the origin of the coordinates and forming a determined angle with the reference plane. The displacement of the first stage relative to the table in the direction substantially normal to the above direction is inhibited by first limiting means.

Abstract: A container for a piece of substrate such as reticle, mask or wafer is disclosed. The container comprises a housing body having an opening for receiving a substrate, a door for closing and opening said opening of the housing body and means for fixing the received substrate to the container. Said fixing means includes a contact member movable to fix the substrate in the position and a member for moving the contact member in link with the motion of the door.

Abstract: In a cross-movable carriage comprising a movable base plate and a stationary base plate, the movable base plate has two first guide grooves formed in one surface thereof and the stationary base plate has two second guide grooves formed in one surface thereof. A guide mechanism comprises two first guide members capable of fitting in the first guide grooves and two second guide members capable of fitting in the second guide grooves. One of the second guide members and one of the first guide members are fastened together, and the other of the second guide members and the other of the first guide members are fastened together. The guide mechanism is provided between the movable base plate and the stationary base plate to permit the first guide members to fit in the first guide grooves and permit the second guide members to fit in the second guide grooves.