Abstract: [Object] To provide an eccentric circling drive device that is capable of performing appropriate lubrication and cooling by means of a processing liquid while preventing energy loss and damage to members due to friction. [Solving Means] A circling shaft 13 of an eccentric circling drive device 100 includes therewithin a flow path 131 that causes the flow of a lubricating oil F. The flow path 131 includes a thrust flow path 131a formed along an axial direction and a radial flow path 131b that extends along a radial direction of the circling shaft 13 from the thrust flow path 131a. An end portion of the radial flow path 131b is connected to a bearing 15. With such a configuration of the flow path 131, the lubricating oil F can be introduced from the end portion 13b of the circling shaft 13 into the bearing 15 by means of the circling motion of the circling shaft 13.

Abstract: [Object] To provide a drive device capable of increasing the drive precision of a movable member for generating power and capable of suppressing the generation of abraded particles. [Solving Means] A fluid machine (100) according to this embodiment has a structure in which a connecting rod as a movable member of a pump unit (20) is not connected to a circling shaft (13) of a motor unit (10) via a bearing but fixed to the circling shaft (13). In other words, the connection structure between the circling shaft (13) and the connecting rod is a structure using no bearings, and the integration, that is, the rigidity, of the circling shaft (13) and the connecting rod can be increased, which can increase the drive precision of the connecting rod. Further, since there are no sliding portions between the circling shaft (13) and the connecting rod, the generation of abraded particles can be suppressed and the reliability of the fluid machine (100) can be increased.

Abstract: Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24?) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20).

Abstract: Pairs of rotors (R1, R2, R3, R4, R5 and R6) driven rotationally by a motor (22) are disposed in the body (21) of a main pump (20) comprising a multistage Roots dry vacuum pump. A suction opening (23) communicating with the rotor chamber of the rotor R1 is provided in the upper wall portion at the left end of the body (21). A delivery section (24) communicating with the delivery side of the rotor chamber of rotor R6 on the final stage is coupled to an exhaust pipe (25) and is provided with a silencer (26) and further coupled to a check valve (28) through a pipe (27). The check valve (28) has its forward direction toward the atmospheric side. The delivery section (24), or a delivery section (24′) at the side intermediate stage, is coupled to an auxiliary pump (30) having an exhaust capacity smaller than that of the main pump (20).