Abstract: A film-forming apparatus is provided with a particle prevention means, whose structure prevents a drop in film-yield due to particle formation. The particle prevention means does not need to be cleaned as frequently as known particle prevention means, thus increasing film production efficiency. This particle prevention means has a tongued-and-grooved surface. When the particle prevention means having a tongued-and-grooved surface is set in the film-forming apparatus, the film-forming material is deposited in a discontinuous manner on the particle prevention means, which can extend the time of film exfoliation, and in turn, extend the cycle for cleaning the particle prevention means, and prevent a drop in film-yield due to the film exfoliation.

Abstract: An ink jet recording apparatus includes a recording head having plural discharge openings for discharging ink, a liquid chamber for storing the ink to be supplied to the discharge openings, a liquid flow path for communicating the discharge openings with the liquid chamber, and plural energy generating elements for generating energy to be used for discharging the ink from the discharge openings. The head also includes a substrate having the energy generating elements provided thereon and a transfer molded structural member made of thermosetting resin. The structural member has a concave portion for forming a liquid flow path, and the structural member is fused to the substrate.

Abstract: A method for manufacture of an ink jet head comprises the process of forming a head main body by providing a positive resist layer to constitute ink passages for a substrate having ink ejection pressure generating means and then a ceiling member therewith; forming a carbon-contained film for the surface where the ink discharging ports of the head main body are formed; conducting a fluoric plasma treatment given to the carbon-contained film by utilizing a hydrofluoride compound; and removing the positive resist layer. With this method, an F-C coupled water repellent film is formed on the discharging port formation surface of an ink jet recording head evenly with a desirable bonding capability to enhance the reliability of water repellency.

Abstract: A method for manufacturing an ink jet head having a discharge opening for discharging ink and an ink passage communicated with the discharge opening, includes the step of forming the discharge opening by performing a cutting operation along a portion where the discharge opening is to be formed, while maintaining the ink passage in a pressurized condition by filling the ink passage with fluid. Another method includes the step of cleaning an ink passage by introducing liquid and gas into the ink passage alternately; and an ink jet apparatus comprising such an ink jet head, and a member for holding the ink jet head.