Abstract: A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra?0.05 ?m and Rmax?0.6 ?m, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

Abstract: A heating apparatus having an electrostatic adsorption function comprising at least a supporting substrate, an electrode for electrostatic adsorption and a heating layer formed on the supporting substrate, and an insulating layer formed so as to cover the electrode for electrostatic adsorption and the heating layer, wherein a surface roughness of the insulating layer satisfies Ra?0.05 ?m and Rmax?0.6 ?m, and Vickers hardness of the surface of the insulating layer is 10 GPa or less. Thus, there can be provided a heating apparatus having an electrostatic adsorption function in which scratches are not generated on a silicon wafer or the like and the generation of particles can be suppressed when heating/cooling the wafer or the like.

Abstract: A power use circuit breaker includes an arc generating switching unit which adds an electrical resistance in a circuit during current interruption to attenuate a current to be interrupted, a vacuum bulb which is electrically connected in series with the arc generating switching unit and interrupts the attenuated current and a current conducting switching unit connected in parallel with the series circuit of the vacuum bulb and the arc generating switching unit. For current conduction the current conducting switching unit is closed after the vacuum bulb and the arc generating switching unit are closed, and for current interruption after opening the current conducting switching unit, the vacuum bulb and the arc generating switching unit are opened.

Abstract: A power use circuit breaker includes an arc generating switching unit which adds an electrical resistance in a circuit during current interruption to attenuate a current to be interrupted, a vacuum bulb which is electrically connected in series with the arc generating switching unit and interrupts the attenuated current and a current conducting switching unit connected in parallel with the series circuit of the vacuum bulb and the arc generating switching unit. For current conduction the current conducting switching unit is closed after the vacuum bulb and the arc generating switching unit are closed, and for current interruption after opening the current conducting switching unit, the vacuum bulb and the arc generating switching unit are opened.

Abstract: An arc generating switching unit 2 which adds an electrical resistance in a circuit during current interruption to attenuate a current to be interrupted, a vacuum bulb 1 which is electrically connected in series with the arc generating switching unit 2 and interrupts the attenuated current and a current conducting switching unit 3 connected in parallel with the series circuit of the vacuum bulb 1 and the arc generating switching unit 2 are provided, and for current conduction the current conducting switching unit 3 is closed after the vacuum bulb 1 and the arc generating switching unit 2 are closed, and for current interruption after opening the current conducting switching unit 3, the vacuum bulb 1 and the arc generating switching unit 2 are opened. Thereby, a small sized power use circuit breaker which performs current conduction and interruption of a large current containing a DC component is obtained.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: An improvement is proposed in the preparation of, for example, a ceramic heater consisting of a substrate plate of boron nitride, a patterned layer of pyrolytic graphite (PG) on the substrate to serve as an electric resistance element and an overcoating layer of pyrolytic boron nitride (PBN) in a process comprising the steps of depositing PG on the substrate surface, pattern-wise removing the PG layer by mechanical working to form grooves and depositing PBN all over. According to the inventive improvement, which can be obtained by forming the grooves in such a fashion that the angle between the direction of a normal line to the facet surface formed by the mechanical working and the growing direction of the substrate of boron nitride is in the range from 0.degree. to 45.degree. so that the internal stress caused in the overcoating layer, which is due to the anisotropy in the thermal expansion of boron nitride, is decreased to prevent the overcoating layer from occurrence of cracks and falling during service.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: A puffer type gas-blast circuit breaker includes a guide section arranged at a coupler section between a shaft section of a puffer cylinder and a dielectric operating rod, for guiding both in the axis direction of a current interruption section and in the radial direction thereof, thereby to suppress or eliminate the occurrence of misalignment of center axis between movable components and fixed ones thus causing a gap to remain constant between a dielectric nozzle and a fixed arc contact. With such an arrangement, the gap between the nozzle and the contact can be kept uniform even when the pole-to-pole distance is increased with an increase in the high withstanding voltage of the breaker. This ensures that the surface-creeping electric field on the inner surface of the dielectric nozzle can be at a desired design value, thus enabling to provide a stable pole-to-pole insulation characteristic during current interruption operations.

Abstract: A puffer type gas breaker is provided, in which high-temperature gas, heated by an electric arc produced immediately after a large current is broken, is quickly discharged to enhance inter-pole dielectric performance. A fixing portion for fixing an arc contact is provided in a cylindrical exhaust pipe for exhausting the high-temperature gas heated by an electric arc produced between poles immediately after a large current is broken. A rectifying member or members is provided in the fixing portion of the cylindrical exhaust pipe. An exhaust port or ports is formed in the fixing portion of the cylindrical exhaust pipe, and a shield is disposed around the outer periphery of the exhaust port or ports.

Abstract: Proposed is an improvement in a vessel, e.g., crucible, of pyrolytic boron nitride (PBN) used, for example, in the process of molecular beam epitaxy for melting silicon and the like at a high temperature. Different from conventional PBN crucibles used for such a process, in which contamination of high-purity silicon is unavoidable by the reaction of molten silicon with PBN or a thermal decomposition products of boron nitride, the inventive PBN vessel is provided on the surface with a protective coating layer of pyrolytic graphite or a refractory metal such as platinum so as not to cause troubles due to contamination of high-purity silicon melted therein with the crucible materials.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: A vacuum switch having a fixed side electrode unit and a movable side electrode unit mounted in a vacuum vessel. Each electrode unit includes an arc electrode, an arc electrode supporting member for supporting the arc electrode, a coil electrode and a conducting rod. Joining portions between the arc electrode and the arc electrode supporting member, the coil electrode and the conducting rod are integrally and directly formed metallurgically by solid phase diffusion using a hot isostatic process. A vacuum circuit breaker may be constructed incorporating the vacuum switch.

Abstract: A compression gas puffer type circuit breaker has a magnetic body surrounding a conductor between a stationary arc contact and a main bus conductor. The magnetic body is protected from being exposed to heated puffer gas generated when a movable arc contact is separated from the stationary arc contact by disposing an insulator partition plate supporting the conductor at the downstream end of a cylindrical contact base carrying a main stationary contact and upstream of the magnetic body. Conductors are disposed around the magnetic body so as to increase flux linkage with the magnetic body when an arcing current flows through the conductor during a circuit breaking operation.

Abstract: An apparatus for controlling a switching device provided for breaking or closing a power line connecting a power source to a load in an electric power system includes a switching timing control unit for controlling the timing to apply a breaking signal to said switching device in response to a breaking signal externally applied thereto so that the contacts of said switching device are opened during a period of time when the current flowing through said power line first reaches its peak value from a zero value and for controlling the timing of applying a closing signal to said switching device in response to a closing command preferably externally applied thereto so that the contacts of said switching device are closed when the voltage of said power source becomes a predetermined value depending upon whether said load is capacitive or inductive, and an operating unit for opening and closing said contacts of said switching device in response to said breaking and closing signals, respectively.

Abstract: According to the present invention there are provided a highly reliable electrode of high strength which undergoes little change even with the lapse of time, and a method for making the same, as well as a vacuum valve using such electrode and a vacuum circuit breaker using such vacuum valve. The vacuum circuit breaker has a fixed electrode and a movable electrode, each comprising an arc electrode, an arc electrode support member for supporting the arc electrode, and a coil electrode contiguous to the arc electrode support member, the arc electrode, the arc electrode support member and the coil electrode being formed as an integral structure by melting, not by bonding, particularly the arc electrode support member and the coil electrode being constituted by a Cu alloy containing 0.05-2.5% by weight of at least one of Cr, Ag, W, V and Zr.

Abstract: A switching mechanism for use e.g. in a circuit breaker of an underground electric substation has a movable rod which causes opening and closing of an electrical contact and a hydraulic operating system. The hydraulic operating system uses a hydraulic fluid which has a high flammability temperature or is incombustible. Thus, even if such fluid leaks from the hydraulic operating system, the risk of fire or explosion is minimized. The hydraulic operating system may have a sealed tank for the fluid, preferably with a variable volume expansion chamber. In a further development, the hydraulic operating system and possibly parts of the movable rod, is enclosed in a casing which is sealed and is filled with a gas which does not support combustion therein. Thus, the risk of fire or explosion is further reduced. The casing may have a variable volume expansion chamber.

Abstract: An electrical power supply system includes an electrical power source system connected to a bus bar and a plurality of electric power transmission systems each connected via circuit breakers to the bus bar. The supply system has overvoltage suppression equipments each installed between the transmission system and the ground. The overvoltage suppression equipment includes a switching device and an impedance connected to the switching device. The switching device in a sound transmission system is closed when the circuit breaker operates in other faulty transmission system, thereby an overvoltage being occurred on the sound system is effectively suppressed.

Abstract: A solid-state switch has a plurality of gate turn-off thyristors connected in the rungs of a ladder circuit and a plurality of diodes connected in the side rails of the ladder circuit. The anode of the first gate turn-off thyristor is connected to the cathodes of the first and second diodes, the cathode of the first gate turn-off thyristor is connected to the anodes of the third and fourth diodes. The cathode of the second gate turn-off thyristor is connected to the anode of the second diode and the anode of the fifth diode, the anode of the second gate turn-off thyristor is connected to the cathode of the fourth diode and the cathode of the sixth diode. The anode of the first diode and the cathode of the third diode are connected together at a common point, which is selected to be one terminal of the switch.

Abstract: A gas isolated disconnecting switch is provided which performs a sufficient restriking surge suppressing function, induces no adverse effect on the operation of a circuit breaker disposed within the system and always enables the circuit breaker to surely interrupt a fault current. Under the closed condition of the gas isolated disconnecting switch, a main stationary member 6 engages with a main movable member 16 and an auxiliary movable member 17 with an auxiliary stationary member 8 respectively. Accordingly the portion of an auxiliary conductor 7 which passes through a cylindrical magnetic body 9 is short-circuited via the main stationary member 6 and the main movable member 16, and no influence is induced on the operation of the circuit breaker disposed in the system. During the opening operation of the disconnecting switch, the auxiliary movable member 17 disengages with a time delay.