Abstract: An optical heating apparatus includes: a plurality of heating sources to optically heat a substrate; a plurality of light transmissive containers in which the heating sources are inserted and which transmit light from the heating sources; and a vacuum chamber including a housing having an inside in which the substrate can be placed, the housing having a hole to insert the plurality of light transmissive containers at a position opposed to the substrate placed in the inside, wherein each of the plurality of heating sources has at least one light emitting element, and the plurality of heating sources emit light toward the substrate placed in the vacuum chamber through the plurality of light transmissive containers inserted in the hole and protruding from the housing toward the inside.

Abstract: A heating treatment method includes: a step (A) of supplying power to both a heating lamp and an LED, and irradiating a heating object with light emitted from the heating lamp and light emitted from the LED to raise the temperature of the heating object; a step (B) of decreasing the power supplied to the heating lamp after performing the step (A); and a step (C) of lowering the temperature of the heating object by decreasing the power supplied to the LED after performing the step (B).

Abstract: A heating treatment method includes: a step (A) of supplying power to both a heating lamp and an LED, and irradiating a heating object with light emitted from the heating lamp and light emitted from the LED to raise the temperature of the heating object; a step (B) of decreasing the power supplied to the heating lamp after performing the step (A); and a step (C) of lowering the temperature of the heating object by decreasing the power supplied to the LED after performing the step (B).

Abstract: Disclosed herein are a filament lamp for heating a disk-shaped workpiece in such a way that the filament lamp rotates relative to the workpiece and radiates light thereonto. Further, the present invention provides a structure that enables the filament lamps to uniformly heat the workpiece even with respect to the radial direction of the workpiece. For this, the filament lamp includes an arc-shaped emitting part which extends in a circumferential direction of the relative rotation, and an auxiliary emitting part which is disposed inside a circle extending along the arc-shaped emitting part and extends from the arc-shaped emitting part in a direction crossing the circle. In addition, the present invention is configured such that areas of the workpiece that correspond to spaces between the arc-shaped emitting parts of the adjacent filament lamps pass just below the corresponding auxiliary emitting parts.

Abstract: Disclosed herein are a filament lamp for heating a disk-shaped workpiece in such a way that the filament lamp rotates relative to the workpiece and radiates light thereonto. Further, the present invention provides a structure that enables the filament lamps to uniformly heat the workpiece even with respect to the radial direction of the workpiece. For this, the filament lamp includes an arc-shaped emitting part which extends in a circumferential direction of the relative rotation, and an auxiliary emitting part which is disposed inside a circle extending along the arc-shaped emitting part and extends from the arc-shaped emitting part in a direction crossing the circle. In addition, the present invention is configured such that areas of the workpiece that correspond to spaces between the arc-shaped emitting parts of the adjacent filament lamps pass just below the corresponding auxiliary emitting parts.

Abstract: A light emitting type heat treatment apparatus includes relatively low rated power density filament lamps and relatively high rated power density filament lamps, in which a heat treatment including a temperature raising heat process for raising a work piece quickly to a predetermined heat treatment temperature by light emitted from the filament lamps, and a constant temperature heating process succeeding the temperature raising heating process in which the work piece is heated while the predetermined heat treatment temperature is maintained, and a control unit which controls lighting state of the filament lamps so that while at least filament lamps with relatively high rated power density are lighted in the temperature raising heating process, in the constant temperature heating process, only filament lamps with relatively low rated power density are lighted.

Abstract: To provide a filament lamp having a plurality of filaments disposed in sequence in the axial direction of a light-emitting lamp tube which is configured so as not to shield emitted light from a center filament, internal leads for two filaments disposed proximate hermetically sealed parts at both ends are connected to metal foils in the same hermetically sealed part.

Abstract: To provide a filament lamp having a plurality of filaments disposed in sequence in the axial direction of a light-emitting lamp tube which is configured so as not to shield emitted light from a center filament, internal leads for two filaments disposed proximate hermetically sealed parts at both ends are connected to metal foils in the same hermetically sealed part.

Abstract: A light emitting type heat treatment apparatus includes relatively low rated power density filament lamps and relatively high rated power density filament lamps, in which a heat treatment including a temperature raising heat process for raising a work piece quickly to a predetermined heat treatment temperature by light emitted from the filament lamps, and a constant temperature heating process succeeding the temperature raising heating process in which the work piece is heated while the predetermined heat treatment temperature is maintained, and a control unit which controls lighting state of the filament lamps so that while at least filament lamps with relatively high rated power density are lighted in the temperature raising heating process, in the constant temperature heating process, only filament lamps with relatively low rated power density are lighted.

Abstract: A filament lamp with bases in which the pinch seal areas are not damaged and no adhesive is used is achieved by the base of a filament lamp with bases having, in its front area, a holding part for holding a pinch seal area and a first opening into which an outer lead pin is inserted, and in its rear area, a second opening into which a plate-shaped terminal is inserted. Furthermore, the base has another opening, between the first opening and the second opening, which is used to weld the outer lead pin to plate-shaped terminal in a direction which orthogonally intersects the lengthwise direction of the base and orthogonally intersects the wider crimped foot surface of the pinch seal area. The plate-shaped terminal has a size such that it does not fall out of the second opening of the base. The terminal is welded to the outer lead pin such that its flat surface is parallel to the pinch seal area.