Abstract: A substrate processing apparatus includes a device management controller including a parts management control part configured to monitor the state of parts constituting the apparatus, a device state monitoring control part configured to monitor integrity of device data obtained from an operation state of the parts constituting the apparatus, and a data matching control part configured to monitor facility data provided from a factory facility to the apparatus. The device management controller is configured to derive information evaluating the operation state of the apparatus based on a plurality of monitoring result data selected from a group consisting of maintenance timing monitoring result data acquired by the parts management control part, device state monitoring result data acquired by the device state monitoring control part, and utility monitoring result data acquired by the data matching control part.

Abstract: A laser welding method is a method for joining a first member in the shape of a plate and made of a metal material to a second member made of a metal material by laser welding. The laser welding method includes an arranging step and a laser beam irradiation step. In the arranging step, the second member is brought into contact with or brought close to one main surface of the first member. In the laser beam irradiation step, the other main surface of the first member is irradiated with the laser beam, the other surface being a main surface opposite to the one main surface of the first member. In the laser beam irradiation step, the first member and the second member are melted to form a weld portion having a substantially circular or oval shape in a plan view and to form a fillet on a joined portion between the first member and the second member.

Abstract: A laser welding method includes a laser beam irradiation step of oscillating a laser beam and condensing the laser beam on a welding portion, and a scanning step of scanning a spot of the laser beam. In the execution of laser welding, while oscillating the laser beam, a screw portion having a dot shape in a plan view is formed in which a metal member is melted by scanning of the spot so as to circle around a predetermined position, and while the metal member in the screw portion is in a molten state, a linear portion being linear in a plan view and continuous with the screw portion is formed in which a metal member is melted by scanning of the spot so as to be separated from the screw portion.

Abstract: Provided is a module which has a package-on-package structure including a redistribution layer and can be easily reduced in height. A module 1 includes an upper module including a substrate, a first component, and a sealing resin layer, and a lower module including an intermediate layer and a redistribution layer. The first component is connected to the redistribution layer with a columnar conductor interposed therebetween and provided in the intermediate layer, and both the first component and a second component are rewired by the redistribution layer. Since the intermediate layer is formed by using a frame-shaped substrate, the upper module and the lower module can be connected without necessarily a bump, so that it is possible to provide a module which has a fanout-type package-on-package structure and can be easily reduced in height.

Abstract: Provided is a module which has a package-on-package structure including a redistribution layer and can be easily reduced in height. A module includes an upper module including a substrate, a first component, and a sealing resin layer, and a lower module including an intermediate layer and a redistribution layer. The first component is connected to the redistribution layer with a columnar conductor interposed therebetween and provided in the intermediate layer, and both the first component and a second component are rewired by the redistribution layer. By fixing a resin block containing the second component to a lower surface of the substrate by a fixing conductor, positional deviation of the second component can be prevented. Further, by polishing an upper surface of the resin block, it is possible to improve the flatness.

Abstract: A modules is provided in which an electronic component is disposed on a first main surface and each of a plurality of first connection terminals is disposed on a second main surface. Moreover, a second connection terminal is disposed on the second main surface. When a substrate is viewed in a direction perpendicular to the second main surface, the second connection terminal is larger in area than each of the first connection terminals. When the substrate is viewed in the direction perpendicular to the second main surface, the second connection terminal is disposed on a straight line connecting the first connection terminals. The second connection terminal serves to establish an electrical connection.

Abstract: A module (101) includes a substrate (1) having a first main surface (la) and including wiring, a first component (31) having a circuit surface (31a), mounted on the first main surface (la) such that the circuit surface (31a) faces the first main surface (la), and having a ground terminal (10) on the circuit surface (31a), a first sealing resin (6a) disposed to cover the first main surface (la) and the first component (31), and a heat dissipation portion (5) provided along an upper surface of the first sealing resin (6a). The wiring is connected to the ground terminal (10), and the module further includes a heat conducting member (7) connecting the wiring and the heat dissipation portion (5).

Abstract: Provided is a module which has a package-on-package structure including a redistribution layer and can be easily reduced in height. A module 1 includes an upper module including a substrate, a first component, and a sealing resin layer, and a lower module including an intermediate layer and a redistribution layer. The first component is connected to the redistribution layer with a columnar conductor interposed therebetween and provided in the intermediate layer, and both the first component and a second component are rewired by the redistribution layer. Since the intermediate layer is formed by using a frame-shaped substrate, the upper module and the lower module can be connected without necessarily a bump, so that it is possible to provide a module which has a fanout-type package-on-package structure and can be easily reduced in height.

Abstract: Provided is a module which has a package-on-package structure including a redistribution layer and can be easily reduced in height. A module includes an upper module including a substrate, a first component, and a sealing resin layer, and a lower module including an intermediate layer and a redistribution layer. The first component is connected to the redistribution layer with a columnar conductor interposed therebetween and provided in the intermediate layer, and both the first component and a second component are rewired by the redistribution layer. By fixing a resin block containing the second component to a lower surface of the substrate by a fixing conductor, positional deviation of the second component can be prevented. Further, by polishing an upper surface of the resin block, it is possible to improve the flatness.

Abstract: An electronic device that includes an electronic component mounted on a multilayer ceramic substrate. The electronic component includes a connection terminal on the mounting surface side thereof, the connection terminal having an end with a rounded convex shape when viewed in cross section. The multilayer ceramic substrate includes a recessed portion at a position corresponding to the connection terminal, the recessed portion having a rounded concave shape when viewed in cross section, and a surface electrode disposed on at least part of the recessed portion and electrically connected to the connection terminal.

Abstract: To provide a wind turbine system or a method of controlling the wind turbine system capable of securing stability in pitch control when a sudden change of wind speed is detected and preventing increase of a load on equipment to thereby improve reliability. A wind turbine system includes blades rotating by receiving the wind, a pitch drive device controlling a pitch angle of each blade and a control device outputting a control signal for suppressing a movement of the pitch angle to a fine direction to the pitch drive device when an increase in wind speed for a prescribed amount or more is detected while performing pitch angle control so that a rotational speed of the blades or equipment rotating in conjunction with rotation of the blades maintains a rated rotational speed.

Abstract: There is provided a wind power generating system including: a rotor that is provided with a blade of which a pitch angle is changeable and that rotates by receiving the wind; a generator that generates power by using rotation energy of the rotor; and a control device that controls a device that is included in the wind power generating system. In a case where a speed is equal to or higher than a wind speed at which a rotation speed of the generator reaches a rated speed and a speed is equal to or lower than a wind speed to reach rated generation power, the control device performs feedforward control of generator torque that is transmitted as a command to the generator and adjusts a change in input energy, based on a wind speed applied to the wind power generating system.

Abstract: To provide a small flying object that is inexpensive and capable of stable flying. In order to solve the above problem, a representative example of the small flying object of the present invention includes an upper rotor that generates thrust by rotating, a lower rotor that is disposed below the upper rotor and rotates coaxially with the upper motor and in the opposite direction to the upper motor, and an inertia balancer that is connected to one of the rotors having a lower rotation speed during hovering among the upper rotor and the lower rotor, and rotates integrally with the one rotor. The inertia balancer compensates a difference between an angular momentum of the one rotor and an angular moment of the other rotor during hovering.

Abstract: It comprises a mask (11) having a first, a second and a third action edge (11a, 11b, 11c), and a drive means for moving the mask (11) relative to a substrate (12) in a uniaxial direction (A) whereby moving the mask at a fixed rate of movement to cause the edges to successively act on an identical substrate region while successively applying different materials thereto forms thin films of three components successively with respective film thickness gradients oriented in three different directions mutually angularly spaced apart by an angle of 120° to allow these films to overlap, thereby forming a ternary phase diagrammatic thin film 13.

Abstract: The present invention realizes reduction of position information demodulation errors caused by the eccentricity of the magnetic disk and improvement of position signal detection accuracy, as well as enabling quick eccentricity clock correction for arbitrary clock frequencies. An inspection device in accordance with the present invention comprises: a servo demodulation unit which demodulates servo information; a PLL clock generating unit which generates a reference clock and supplies the reference clock to the servo demodulation unit; and a tester control unit. The PLL clock generating unit includes an eccentricity correction circuit for correcting the frequency of the reference clock depending on the eccentricity of the magnetic disk. The tester control unit generates correction data for correcting the frequency of the reference clock, multiplies the correction data by the inverse of a transfer function of the PLL clock generating unit, and supplies the product to the eccentricity correction circuit.

Abstract: An electronic component achieves significantly improved adhesion strength between an external electrode and a substrate body and includes an insulative substrate body, at least one groove disposed in at least one main surface of the substrate body, at least one external electrode disposed on the at least one main surface of the substrate body, wherein a portion of the at least one external electrode is disposed in at least a portion of the groove.

Abstract: Traffic situation determination systems, methods, and programs acquire a current position of the vehicle based on a radio signal received from a GPS satellite and determine a first travel path of the vehicle based on the acquired position of the vehicle. The systems, methods, and programs determine whether a road on which the vehicle is traveling has a traffic jam. If the road on which the vehicle is traveling has a traffic jam, the systems, methods and programs transmit first information relating to the first travel path from the vehicle to an information center. The systems, methods, and programs receive second information relating to a second travel path of the vehicle, the second information being received from a mobile phone communication center and being based on a mobile phone signal received by the mobile phone communication center.

Abstract: The present invention realizes reduction of position information demodulation errors caused by the eccentricity of the magnetic disk and improvement of position signal detection accuracy, as well as enabling quick eccentricity clock correction for arbitrary clock frequencies. An inspection device in accordance with the present invention comprises: a servo demodulation unit which demodulates servo information; a PLL clock generating unit which generates a reference clock and supplies the reference clock to the servo demodulation unit; and a tester control unit. The PLL clock generating unit includes an eccentricity correction circuit for correcting the frequency of the reference clock depending on the eccentricity of the magnetic disk. The tester control unit generates correction data for correcting the frequency of the reference clock, multiplies the correction data by the inverse of a transfer function of the PLL clock generating unit, and supplies the product to the eccentricity correction circuit.

Abstract: Drive waveforms with which extension and contraction characteristics of an actuator corresponding to a number of track eccentricity amounts are stored as data. By reading servo information written in a disk is obtained as a signal indicating a head displacement amount from a track. The head is moved in a direction in which the track is displaced by obtaining an amplitude corresponding to a slip amount of the head position and a rotation angle of maximum eccentricity, reading drive waveforms which is optimal in driving the actuator from the memory and driving the actuator with a drive waveform matched with the rotation angle at which the eccentricity is maximum.

Abstract: Vehicle position information providing devices, methods, and programs acquire a first current position of a vehicle based on a radio signal received from a GPS satellite and acquire a second current position of the vehicle based on a signal received by a communication device that communicates over a mobile phone network. The devices, methods, and programs determine whether the first current position and the second current position coincide. If the first current position and the second current position do not coincide, the devices, methods, and programs cause the communication device to transmit information relating to the first current position to an information center.