Abstract: A molecular pump includes a pump body provided with a turbo molecular pump portion, a control unit provided with a control portion and a power supply portion, and a cooling unit for cooling the pump body and the control unit. A first temperature detecting portion is provided in a first position, which is a position inside the control unit and has a low temperature. A second temperature detecting portion also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit and has a high temperature. The control portion controls the operation of the cooling unit in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion and based on temperature information and humidity information detected by the second temperature detecting portion also serving as a humidity detecting portion.

Abstract: A molecular pump includes a pump body provided with a turbo molecular pump portion, a control unit provided with a control portion and a power supply portion, and a cooling unit for cooling the pump body and the control unit. A first temperature detecting portion is provided in a first position, which is a position inside the control unit and has a low temperature. A second temperature detecting portion also serving as a humidity detecting portion is provided in a second position, which is a position inside the control unit and has a high temperature. The control portion controls the operation of the cooling unit in accordance with a relative humidity in the first position, calculated based on temperature information detected by the first temperature detecting portion and based on temperature information and humidity information detected by the second temperature detecting portion also serving as a humidity detecting portion.

Abstract: An aeration-type rotary dryer injects air into or onto a flow of materials a rotating cylinder. The air is supplied to an air duct (21) axially passing through the cylinder (10) from the outlet box (11) to the inlet box (12). The axial duct (21) is composed of a plurality of longitudinally, successively connected tubular members (22, 23, 24) each nearer to the inlet box being smaller in diameter than other. The most inlet-sided member (24), located in a central opening (32) of an inlet partition (31) of the cylinder, has the smallest diameter, so that the inlet partition has the central opening reduced and its threshold height increased. This results that the materials are prevented from returning to the inlet box out of the cylinder. The most outlet-sided member (22), located in a central opening (34) of an outlet partition (33) of the cylinder, has the largest diameter, so that a void space in the central opening (34) may be too small to exhaust air.

Abstract: A direct heat rotary dryer having a single-wall rotating cylinder (10), an axial duct (20) connected to a hot-air source to axially extend inside the cylinder, a plurality of radial ducts (21) branched from the axial duct, each radial duct extending slantingly downwardly near to the inner surface of the cylinder and being formed with a nozzle, whereby hot air flows through materials so that an efficient heat-transfer is made between the materials and the hot air. A plurality of pins (25) are provided on the inner surface of the cylinder (10) along a circle between two adjacent radial ducts (21) to prevent materials from forming lumps.