Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an emitter emitting a charged particle beam, a shaping aperture array forming multiple beams by allowing the charged particle beam to pass through a plurality of opening portions, an alignment unit disposed between the emitter and the shaping aperture array, the alignment unit including an aperture plate, a detector provided in the aperture plate and detecting charged particles, and an alignment coil adjusting an angle of incidence of the charged particle beam on the aperture plate, a feature quantity calculating unit calculating, from an alignment scan image based on a detection value of the detector, a feature quantity representing a perpendicularity of the angle of incidence of the charged particle beam on the aperture plate, and a coil control unit controlling an excitation value of the alignment coil based on the feature quantity.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an aperture plate having a plurality of holes to form multiple beams, a blanking aperture array having a plurality of blankers which switch ON-OFF of corresponding respective beams among the multiple beams, a stage on which a writing target substrate is placed, an inspection aperture provided on the stage and that allows one beam among the multiple beams to pass therethrough, a deflector deflecting the multiple beams, a current detector detecting a beam current of each of the multiple beams that has passed through the inspection aperture in a case where the multiple beams are scanned on the inspection aperture, and a control computing machine that generates a beam image based on the detected beam current and detects a defect of the blanking aperture array or the aperture plate based on the beam image.

Abstract: According to one embodiment, a multi charged particle beam writing apparatus includes an objective lens adjusting a focus position of multiple beams, a coil correcting astigmatism of the multiple beams, an inspection aperture disposed in a stage and configured to allow one beam of the multiple beams to pass therethrough, a deflector deflecting the multiple beams, a current detector detecting a beam current of each beam of the multiple beams scanned over the inspection aperture in the XY direction and passed through the inspection aperture, and a controller generating a beam image on the basis of the detected beam current, calculating a feature quantity of the beam image, and controlling the objective lens or the coil on the basis of the feature quantity.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an aperture plate forming multiple beams, a stage on which a writing target substrate is placed, a stage position detector detecting the position of the stage, an inspection aperture plate provided in the stage, the inspection aperture plate permitting one of the multiple beams to pass through the inspection aperture plate, a deflector deflecting the multiple beams, a current detector detecting a beam current of each of the multiple beams scanned over the inspection aperture plate in X and Y directions and passed through the inspection aperture plate, and a control computer generating a beam image based on the detected beam currents and calculating positions of the beams based on the beam image and the position of the stage.

Abstract: In one embodiment, a method for measuring a resolution of a charged particle beam includes changing a focus position of the charged particle beam in a height direction, and scanning a dot mark formed on a substrate with the charged particle beam for each focus position, detecting a reflected charged particle reflected from the dot mark for each focus position, calculating a scattered charged particle distribution from a detection result of the reflected charged particle for each height corresponding to the focus position, performing a convolution operation on an approximate expression of a beam waveform of the charged particle beam and a mark shape of the dot mark, the approximate expression including an aperture angle and a resolution of the charged particle beam as parameters, and calculating the aperture angle and the resolution by fitting the scattered charged particle distribution by height and a calculation result of the convolution operation.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an emitter that emits a charged particle beam, an aperture plate in which a plurality of openings are formed and that forms multiple beams by allowing the charged particle beam to pass through the plurality of openings, a blanking plate provided with a plurality of blankers that each perform blanking deflection on a corresponding beam included in the multiple beams, a stage on which a substrate irradiated with the multiple beams, a detector that detects a reflection charged particle from the substrate, feature amount calculation circuitry that calculates a feature amount of an aperture image based on a detection value of the detector, and aberration correction circuitry that corrects aberration of the charged particle beam based on the feature amount.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an emitter emitting a charged particle beam, a shaping aperture array forming multiple beams by allowing the charged particle beam to pass through a plurality of opening portions, an alignment unit disposed between the emitter and the shaping aperture array, the alignment unit including an aperture plate, a detector provided in the aperture plate and detecting charged particles, and an alignment coil adjusting an angle of incidence of the charged particle beam on the aperture plate, a feature quantity calculating unit calculating, from an alignment scan image based on a detection value of the detector, a feature quantity representing a perpendicularity of the angle of incidence of the charged particle beam on the aperture plate, and a coil control unit controlling an excitation value of the alignment coil based on the feature quantity.

Abstract: According to one embodiment, a multi charged particle beam writing apparatus includes an objective lens adjusting a focus position of multiple beams, a coil correcting astigmatism of the multiple beams, an inspection aperture disposed in a stage and configured to allow one beam of the multiple beams to pass therethrough, a deflector deflecting the multiple beams, a current detector detecting a beam current of each beam of the multiple beams scanned over the inspection aperture in the XY direction and passed through the inspection aperture, and a controller generating a beam image on the basis of the detected beam current, calculating a feature quantity of the beam image, and controlling the objective lens or the coil on the basis of the feature quantity.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an aperture plate forming multiple beams, a stage on which a writing target substrate is placed, a stage position detector detecting the position of the stage, an inspection aperture plate provided in the stage, the inspection aperture plate permitting one of the multiple beams to pass through the inspection aperture plate, a deflector deflecting the multiple beams, a current detector detecting a beam current of each of the multiple beams scanned over the inspection aperture plate in X and Y directions and passed through the inspection aperture plate, and a control computer generating a beam image based on the detected beam currents and calculating positions of the beams based on the beam image and the position of the stage.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an aperture plate having a plurality of holes to form multiple beams, a blanking aperture array having a plurality of blankers which switch ON-OFF of corresponding respective beams among the multiple beams, a stage on which a writing target substrate is placed, an inspection aperture provided on the stage and that allows one beam among the multiple beams to pass therethrough, a deflector deflecting the multiple beams, a current detector detecting a beam current of each of the multiple beams that has passed through the inspection aperture in a case where the multiple beams are scanned on the inspection aperture, and a control computing machine that generates a beam image based on the detected beam current and detects a defect of the blanking aperture array or the aperture plate based on the beam image.

Abstract: In one embodiment, a multi charged particle beam writing apparatus includes an emitter that emits a charged particle beam, an aperture plate in which a plurality of openings are formed and that forms multiple beams by allowing the charged particle beam to pass through the plurality of openings, a blanking plate provided with a plurality of blankers that each perform blanking deflection on a corresponding beam included in the multiple beams, a stage on which a substrate irradiated with the multiple beams, a detector that detects a reflection charged particle from the substrate, feature amount calculation circuitry that calculates a feature amount of an aperture image based on a detection value of the detector, and aberration correction circuitry that corrects aberration of the charged particle beam based on the feature amount.

Abstract: In one embodiment, a method for measuring a resolution of a charged particle beam includes changing a focus position of the charged particle beam in a height direction, and scanning a dot mark formed on a substrate with the charged particle beam for each focus position, detecting a reflected charged particle reflected from the dot mark for each focus position, calculating a scattered charged particle distribution from a detection result of the reflected charged particle for each height corresponding to the focus position, performing a convolution operation on an approximate expression of a beam waveform of the charged particle beam and a mark shape of the dot mark, the approximate expression including an aperture angle and a resolution of the charged particle beam as parameters, and calculating the aperture angle and the resolution by fitting the scattered charged particle distribution by height and a calculation result of the convolution operation.

Abstract: A relay apparatus (10) is provided with a first signal transmitting device compliant with one second signal transmitting device compliant with another standard, a first obtaining device, a second obtaining device, a generating device and a controlling device. If the relay apparatus is connected to an output apparatus via the first signal transmitting device and is connected to a first unit via the second signal transmitting device, the first obtaining device obtains first information about the first unit; a second obtaining device obtains second information about a second unit connected to the output apparatus; a generating device generates third information that allows selection and operation of each of first and second units, on the basis of first and second information, and transmits the third information to the output apparatus; and a controlling device controls the first unit according to a command signal outputted from the output apparatus.

Abstract: A collective content consisting of a plurality of partial contents holding license information including a use condition can be appropriately used according to the use condition contained in the license information in each of the partial contents. A content use control device includes an input/output I/F, license generation unit, output control unit, content reproduction unit, and use control unit. The partial content holding the license information including the use condition is inputted via the input/output I/F. License information is assigned to each of the partial contents inputted and constituting a collective content. Single license information collecting the assigned license information and its collective content are outputted to a recording medium. The content use control device reproduces a partial content contained in the collective content recorded on the recording medium and controls the use of the reproduced partial content according to its use condition.

Abstract: A recording/reproducing apparatus (115) includes a storage section (117) having a content attribute database (DB1) and a point database (DB2). Further, a point calculating section (120) of the recording/reproducing apparatus (115) extracts attribute information sets for each content item from the content attribute database (DB1). Further, deletion factor points associated with deletion factors corresponding to the extracted attribute information sets are extracted from the point database (DB2) for each content item, and evaluation points are calculated in accordance with the extracted plural deletion factor points. This allows the user to appropriately reserve a space required in a recording medium.

Abstract: There is provided an information recording medium that reduces operation of shifting information backward or putting information forward closer together upon recording/deleting/dividing information to facilitate processes of recording/deleting/dividing information. An information recording medium records Programs 1 composed of image data, etc., UPGR 3 that refers to at least a part of the Programs 1, PGRG 5 that refers to the UPGR 3, a PGRM that collectively records the UPGR 3 and reference information thereof, and a PGRGM that collectively records the PGRG 5 and reference information thereof. When recording the UPGR 3, the information recording medium refers to the reference information contained in the PGRM, and when invalid reference information or reference information giving no reference to any UPGR 3 is present, records the UPGR 3 using the reference information.

Abstract: When data whose storage period is limited by copy control information is temporarily stored in a removable recording medium, the data are encrypted and decoding information (encryption key) necessary to decrypt the encrypted data is held on the device side. By doing so, the data cannot be used beyond a permitted period of the temporary storage. A storage device has an external input/output I/F for removably connecting a removable recording medium; a reception section for receiving copy control information and data (such as video data), the storage period of which data is limited by the copy control information; an encrypting section for encrypting the received data; and a control section for storing the encrypted data in the removable recording medium and storing decryption information (encryption key), necessary to decrypt the encrypted data, in a place in the storage device, outside the removable recording medium.

Abstract: To enable a recording device recording a video/audio signal and information necessary for utilizing the video/audio signal to copy the video/audio signal with the converted bit rate, encoding format, etc., to another recording device when utilizing the video/audio signal by the another recording device, and to move only the information necessary for utilizing the video/audio signal between the recording device and the another recording device. A recording device comprises: an input portion that inputs a video/audio signal; a recording portion that records the video/audio signal and information necessary for utilizing the video/audio signal; and a converting portion that converts the recorded video/audio signal. The recording device, leaving the original video/audio signal, copies the video/audio signal whose bit rate, encoding format, etc.

Abstract: A collective content consisting of a plurality of partial contents holding license information including a use condition can be appropriately used according to the use condition contained in the license information in each of the partial contents. A content use control device includes an input/output I/F, license generation unit, output control unit, content reproduction unit, and use control unit. The partial content holding the license information including the use condition is inputted via the input/output I/F. License information is assigned to each of the partial contents inputted and constituting a collective content. Single license information collecting the assigned license information and its collective content are outputted to a recording medium. The content use control device reproduces a partial content contained in the collective content recorded on the recording medium and controls the use of the reproduced partial content according to its use condition.

Abstract: In an information recording device (10), a content control unit (14a) divides an input content into a plurality of sections and further subdivides each section into recording units with predetermined data amounts. An attached information generating unit (14b) generates attached information necessary for making use of the input information and license. An encrypting unit (15) generates encrypting information by using a number that is included in the attached information and that is allocated to the input information, and encrypts information included in the recording unit by the encrypted information. Further, the information encrypted by the encrypting unit, the attached information corresponding to the input information and the license are associated with every section divided by the content control unit through an outside input and output I/F(11) and the associated information and the license are recorded on a recording medium.