Abstract: An organic light-emitting element includes, from a first surface of a substrate in this order, the substrate, a lower electrode, an organic compound layer, an upper electrode, a first protective layer containing inorganic material, a second protective layer whose density is higher than the density of the first protective layer, and a third protective layer whose density is higher than the density of the first protective layer, in which the third protective layer is disposed on a second surface of the substrate opposite to the first surface of the substrate.

Abstract: An organic light-emitting element includes, from a first surface of a substrate in this order, the substrate, a lower electrode, an organic compound layer, an upper electrode, a first protective layer containing inorganic material, a second protective layer whose density is higher than the density of the first protective layer, and a third protective layer whose density is higher than the density of the first protective layer, in which the third protective layer is disposed on a second surface of the substrate opposite to the first surface of the substrate.

Abstract: An organic light-emitting element includes, from a first surface of a substrate in this order, the substrate, a lower electrode, an organic compound layer, an upper electrode, a first protective layer containing inorganic material, a second protective layer whose density is higher than the density of the first protective layer, and a third protective layer whose density is higher than the density of the first protective layer, in which the third protective layer is disposed on a second surface of the substrate opposite to the first surface of the substrate.

Abstract: An organic light-emitting element includes, from a first surface of a substrate in this order, the substrate, a lower electrode, an organic compound layer, an upper electrode, a first protective layer containing inorganic material, a second protective layer whose density is higher than the density of the first protective layer, and a third protective layer whose density is higher than the density of the first protective layer, in which the third protective layer is disposed on a second surface of the substrate opposite to the first surface of the substrate.

Abstract: A method for producing an organic light-emitting device is provided for an organic light-emitting device having a substrate provided with external connection terminals, organic light-emitting elements provided on the substrate, and a protective film that covers the organic light-emitting elements. The method includes, sequentially, providing a protective film removal layer on the external connection terminals, forming the protective film on the substrate, dividing the substrate on which the protective film has been formed, and cleaning the substrate with water, an aqueous solution, or a solvent. The protective film removal layer and the protective film are removed from the external connection terminals as a result of cleaning the substrate.

Abstract: An organic EL device includes a substrate; a layered structure including a first electrode, an organic layer, and a second electrode disposed on the substrate in this order; and laminated protective layers surrounding at least the layered structure. The protective layers are composed of silicon, nitrogen, hydrogen, and fluorine. The fluorine content in the outermost protective layer is in the range of 0.01 to 1.0 atomic percent.

Abstract: An organic EL device includes a substrate; a layered structure including a first electrode, an organic layer, and a second electrode disposed on the substrate in this order; and laminated protective layers surrounding at least the layered structure. The protective layers are composed of silicon, nitrogen, hydrogen, and fluorine. The fluorine content in the outermost protective layer is in the range of 0.01 to 1.0 atomic percent.

Abstract: Provided is an organic EL device including a substrate, a lower electrode, an organic compound layer containing one of an alkali metal and an alkali metal compound, an upper electrode formed of an oxide film, and passivation layers for covering the lower electrode, the organic compound layer, and the upper electrode, the lower electrode, the organic compound layer, the upper electrode, and the passivation layers being stacked in the stated order on the substrate, in which the passivation layers include a first passivation layer formed on the upper electrode, which contains silicon as a main component, and which is free of hydrogen and a second passivation layer formed on the first passivation layer which contains silicon as a main component and hydrogen.

Abstract: Provided is an organic light-emitting apparatus in which a crack or the like produced when removing a passivation layer on an external connection terminal is prevented from developing with the elapse of time and the moisture resistance of a light-emitting area is not impaired. The organic light-emitting apparatus includes a substrate; an organic planarization layer for planarizing unevenness of the substrate; an organic light-emitting device including a lower electrode, an organic compound layer, and an upper electrode; and a passivation layer for covering the organic light-emitting device, in which the organic planarization layer has formed therein a recessed or protruding discontinuous portion for dividing a region including a light-emitting area and a region including an external connection terminal, and the discontinuous portion is covered with the passivation layer.

Abstract: An organic EL device includes a substrate; a layered structure including a first electrode, an organic layer, and a second electrode disposed on the substrate in this order; and laminated protective layers surrounding at least the layered structure. The protective layers are composed of silicon, nitrogen, hydrogen, and fluorine. The fluorine content in the outermost protective layer is in the range of 0.01 to 1.0 atomic percent.

Abstract: An organic EL device includes a substrate; a layered structure including a first electrode, an organic layer, and a second electrode disposed on the substrate in this order; and laminated protective layers surrounding at least the layered structure. The protective layers are composed of silicon, nitrogen, hydrogen, and fluorine. The fluorine content in the outermost protective layer is in the range of 0.01 to 1.0 atomic percent.

Abstract: A method for producing an organic light-emitting device is provided for an organic light-emitting device having a substrate provided with external connection terminals, organic light-emitting elements provided on the substrate, and a protective film that covers the organic light-emitting elements. The method includes, sequentially, providing a protective film removal layer on the external connection terminals, forming the protective film on the substrate, dividing the substrate on which the protective film has been formed, and cleaning the substrate with water, an aqueous solution, or a solvent. The protective film removal layer and the protective film are removed from the external connection terminals as a result of cleaning the substrate.

Abstract: In a plasma processing method, on a back side of a cathode electrode is provided at least one conductor plate d.c. potentially insulated from the cathode electrode and an opposing electrode, and the cathode electrode and the conductor plate are enclosed with a shielding wall such that a ratio of an inter-electrode coupling capacitance provided by the cathode electrode and the opposing electrode to a coupling capacitance provided by the cathode electrode and a bottom surface of the shielding wall on the back side of the conductor plate is not less than a predetermined value. Thereby, a high-quality, high-speed plasma processing is realized.

Abstract: A plasma-processing apparatus having a high frequency power application electrode in which plasma is generated by supplying VHF power to the high frequency power application electrode. The plasma-processing apparatus has an impedance-matching equipment comprising a capacitive element and an inductive element, which are mutually connected in series. The apparatus is arranged so that the capacitive element and the inductive element of the impedance-matching equipment are symmetrical with respect to the center of the high frequency power application electrode.

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film).

Abstract: Provided is an organic EL device including a substrate, a lower electrode, an organic compound layer containing one of an alkali metal and an alkali metal compound, an upper electrode formed of an oxide film, and passivation layers for covering the lower electrode, the organic compound layer, and the upper electrode, the lower electrode, the organic compound layer, the upper electrode, and the passivation layers being stacked in the stated order on the substrate, in which the passivation layers include a first passivation layer formed on the upper electrode, which contains silicon as a main component, and which is free of hydrogen and a second passivation layer formed on the first passivation layer which contains silicon as a main component and hydrogen.

Abstract: Provided is an organic light-emitting apparatus in which a crack or the like produced when removing a passivation layer on an external connection terminal is prevented from developing with the elapse of time and the moisture resistance of a light-emitting area is not impaired. The organic light-emitting apparatus includes a substrate; an organic planarization layer for planarizing unevenness of the substrate; an organic light-emitting device including a lower electrode, an organic compound layer, and an upper electrode; and a passivation layer for covering the organic light-emitting device, in which the organic planarization layer has formed therein a recessed or protruding discontinuous portion for dividing a region including a light-emitting area and a region including an external connection terminal, and the discontinuous portion is covered with the passivation layer.