Abstract: In order to accurately judge whether or not there is a seat leakage in the first valve and the second valve in a short period of time, a fluid control apparatus comprises a fluid resistor arranged in a flow channel, a first valve arranged upstream of the fluid resistor, a first pressure sensor that measures a pressure in a first volume between the first valve and the fluid resistor in the flow channel, a second valve arranged downstream of the fluid resistor, a second pressure sensor that measures a pressure in a second volume between the fluid resistor and the second valve, a valve controller that controls the first or second valve, and a seat leakage judging part that judges whether or not there is a seat leakage in the valve valves based on the pressure sensors in a state where the valves are fully closed.

Abstract: In order to accurately judge whether or not there is a seat leakage in the first valve and the second valve in a short period of time, a fluid control apparatus comprises a fluid resistor arranged in a flow channel, a first valve arranged upstream of the fluid resistor, a first pressure sensor that measures a pressure in a first volume between the first valve and the fluid resistor in the flow channel, a second valve arranged downstream of the fluid resistor, a second pressure sensor that measures a pressure in a second volume between the fluid resistor and the second valve, a valve controller that controls the first or second valve, and a seat leakage judging part that judges whether or not there is a seat leakage in the valve valves based on the pressure sensors in a state where the valves are fully closed.

Abstract: In order to provide a flow rate control apparatus that estimates a flow rate actually flowing at a control point without a large amount of noise, there are provided a fluid resistor that is provided on a flow path, a downstream-side valve that is provided on a downstream side of the fluid resistor, a resistance flow rate measurement mechanism that measures a resistance flow rate that flows through the fluid resistor, and flows into a volumetric space located on the flow path between this fluid resistor and the downstream-side valve, a subject flow rate estimation part that estimates a valve flow rate based on the flow rate characteristics stored in the flow rate characteristics storage part, and a flow rate control unit that controls the downstream-side valve based on a set flow rate, and on the valve flow rate estimated by the subject flow rate estimation part.

Abstract: In order to provide a flow rate control apparatus that estimates a flow rate actually flowing at a control point without a large amount of noise, there are provided a fluid resistor that is provided on a flow path, a downstream-side valve that is provided on a downstream side of the fluid resistor, a resistance flow rate measurement mechanism that measures a resistance flow rate that flows through the fluid resistor, and flows into a volumetric space located on the flow path between this fluid resistor and the downstream-side valve, a subject flow rate estimation part that estimates a valve flow rate based on the flow rate characteristics stored in the flow rate characteristics storage part, and a flow rate control unit that controls the downstream-side valve based on a set flow rate, and on the valve flow rate estimated by the subject flow rate estimation part.