Patents by Inventor Yuko KIRIDOSHI

Yuko KIRIDOSHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Radiation-sensitive resin composition, polymer and method for forming a resist pattern
    Patent number: 9598520
    Abstract: A radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation-sensitive acid generator. The first polymer has a structure unit represented by a following formula (1-1), a structure unit represented by a following formula (1-2), or both thereof, and has a content of fluorine atoms of no less than 5% by mass to a total mass of the first polymer. The second polymer has an acid-dissociable group, and has a content of fluorine atoms of less than 5% by mass to a total mass of the second polymer.
    Type: Grant
    Filed: May 17, 2012
    Date of Patent: March 21, 2017
    Assignee: JSR Corporation
    Inventors: Yuko Kiridoshi, Takehiko Naruoka, Yukio Nishimura, Yusuke Asano, Takanori Kawakami, Hiromitsu Nakashima
  • RADIATION-SENSITIVE RESIN COMPOSITION, POLYMER AND METHOD FOR FORMING A RESIST PATTERN
    Publication number: 20120295197
    Abstract: A radiation-sensitive resin composition includes a first polymer, a second polymer and a radiation-sensitive acid generator. The first polymer has a structure unit represented by a following formula (1-1), a structure unit represented by a following formula (1-2), or both thereof, and has a content of fluorine atoms of no less than 5% by mass to a total mass of the first polymer. The second polymer has an acid-dissociable group, and has a content of fluorine atoms of less than 5% by mass to a total mass of the second polymer.
    Type: Application
    Filed: May 17, 2012
    Publication date: November 22, 2012
    Applicant: JSR Corporation
    Inventors: Yuko KIRIDOSHI, Takehiko NARUOKA, Yukio NISHIMURA, Yusuke ASANO, Takanori KAWAKAMI, Hiromitsu NAKASHIMA