Patents by Inventor Yuko Shima

Yuko Shima has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck
    Publication number: 20050168908
    Abstract: An electrostatic chuck is provided in which a lower oxide coating, an electrode, and an upper oxide coating are formed on a substrate. The lower oxide coating is formed by spraying an oxide of Gd, Tb, Dy, Ho, Er, Tm, Yb or Lu and has a dielectric strength of 15-50 kV/mm.
    Type: Application
    Filed: February 8, 2005
    Publication date: August 4, 2005
    Inventors: Takao Maeda, Satoshi Shima, Yuko Shima