Abstract: A semiconductor wafer inspection device which identifies an operator when an operation is performed and checks if the requested operation is permitted is provided. In a device that has already performed an operator authentication, the operator identification is further carried out when a particular operation is requested. If the operation requested is a permitted one, it is executed even if requested by an operator different from the one previously authenticated. The history of operations and the change history of in-device data are recorded and displayed. The operator authentication is performed only when necessary.

Abstract: A semiconductor wafer inspection device is provided which identifies an operator when an operation is performed and checks if the requested operation is permitted. In the device that has already performed an operator authentication, the operator identification is further carried out when a particular operation is requested. If the operation requested is a permitted one, it is executed even if requested by an operator different from the one previously authenticated. The history of operations and the change history of in-device data are recorded and displayed. Performing the operator authentication only when necessary can prevent illicit access to the in-device information without degrading the operability.