Patents by Inventor Yulaka Shiraishi

Yulaka Shiraishi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS, TARGET COLLECTION DEVICE, AND TARGET COLLECTION METHOD
    Publication number: 20130134326
    Abstract: A target collection device may include a collection container having an opening through which a target material is collected into the collection container, and a temperature adjuster configured to adjust a temperature of the collection container to a temperature that is equal to or higher than a melting point of the target material. The target collection device may be part of an extreme ultraviolet light generation apparatus. Methods of target collection are also provided.
    Type: Application
    Filed: August 27, 2012
    Publication date: May 30, 2013
    Inventors: Takayuki Yabu, Youichi Sasaki, Yulaka Shiraishi, Shinji Nagai, Osamu Wakabayashi