Abstract: A film forming method includes discretely arranging, on a substrate, a plurality of droplets of a curable composition containing a polymerizable compound that is a nonvolatile component, and a solvent that is a volatile component, analyzing an image obtained by capturing a process in which each of the plurality of droplets is connected to an adjacent droplet on the substrate, thereby forming a continuous liquid film on the substrate, volatilizing the solvent contained in the liquid film by enhancing a solvent volatilization effect as compared to the process of forming the liquid film, and forming a cured film by curing the liquid film, wherein if an analysis result obtained in the analyzing satisfies a predetermined condition representing that a forming state of the liquid film is sufficient, a process advances to the volatilizing and then advances to the forming.

Abstract: A control apparatus which controls a force applied to an object, includes a driver configured to apply the force to the object, an estimator configured to estimate, based on information related to a state of the object, an estimated value of a disturbance force to be applied to the object, a corrector configured to correct, based on the estimated value, a command value provided to the driver so as to reduce an influence of the disturbance force, and a determiner configured to execute processing for determining a plurality of parameter values to be used by the estimator to obtain the estimated value based on the information.