Patents by Inventor Yumi Sung

Yumi Sung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma Processing Devices Having a Surface Protection Layer
    Publication number: 20160079040
    Abstract: Plasma processing devices may include a process chamber body, a substrate support unit in a lower portion of the process chamber body, and a window part in an upper portion of the process chamber body. The window part may include a base layer and a surface protection layer on the base layer and configured to face the substrate support unit. The surface protection layer may include an oxide having a columnar structure.
    Type: Application
    Filed: July 8, 2015
    Publication date: March 17, 2016
    Inventors: MyoungSoo Park, Hakyoung Kim, Yumi Sung, Seungkyu Lim