Patents by Inventor Yun-Feng KAO
Yun-Feng KAO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240130113Abstract: A semiconductor device includes an insulating base including a trench, a transistor including a gate electrode and vertical channel in the trench, and a source electrode in the insulating base outside the trench, an isolation layer on the gate electrode in the trench, and a capacitor including a trench capacitor portion that is on the isolation layer in the trench, and a stacked capacitor portion that is coupled to the source electrode of the transistor outside the trench.Type: ApplicationFiled: December 26, 2023Publication date: April 18, 2024Inventors: Yun-Feng KAO, Katherine H. CHIANG
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Patent number: 11963365Abstract: An active device, a semiconductor device and a semiconductor chip are provided. The active device includes: a channel layer; a top source/drain electrode, disposed at a top side of the channel layer; a first bottom source/drain electrode and a second bottom source/drain electrode, disposed at a bottom side of the channel layer; a first gate structure and a second gate structure, located between the top source/drain electrode and the first bottom source/drain electrode, wherein the first gate structure comprises a non-ferroelectric dielectric layer, and the second gate structure comprises a ferroelectric layer; and a third gate structure and a fourth gate structure, located between the top source/drain electrode and the second bottom source/drain electrode, wherein the third gate structure comprises a non-ferroelectric dielectric layer, and the fourth gate structure comprises a ferroelectric layer.Type: GrantFiled: February 18, 2022Date of Patent: April 16, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Katherine H Chiang
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Publication number: 20240086692Abstract: A semiconductor device may include a non-volatile memory cell structure that may be formed in a back end region of a semiconductor device. The non-volatile memory cell structure may include a floating gate structure in which a portion of a dielectric layer is included between a gate structure and a word line conductive structure. The separation of the gate structure and the word line conductive structure by the dielectric layer results in the gate structure being a floating gate structure. This enables a charge to be selectively stored on the gate structure, even when power is removed from the word line conductive structure. The non-volatile memory cell structure along with a volatile memory cell structure are provided in the back end region of the semiconductor device, such that caching and long-term storage may be performed in the back end region of the semiconductor device.Type: ApplicationFiled: January 5, 2023Publication date: March 14, 2024Inventors: Yun-Feng KAO, Katherine H. CHIANG, Chia Yu LING
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Publication number: 20240074137Abstract: A capacitorless dynamic random access memory (DRAM) cell may include a plurality of transistors. At least a subset of the transistors may include a channel layer that approximately resembles an inverted U shape, an ohm symbol (?) shape, or an uppercase/capital omega (?) shape. The particular shape of the channel layer provides an increased channel length for the subset of the transistors, which may reduce the off current and may reduce current leakage in the subset of the transistors. The reduced off current and reduced current leakage may increase data retention in the subset of the transistors and/or may increase the reliability of the subset of the transistors without increasing the footprint of the subset of the transistors. Moreover, the particular shape of the channel layer enables the subset of the transistors to be formed with a top-gate structure, which provides low integration complexity with other transistors in the capacitorless DRAM cell.Type: ApplicationFiled: August 25, 2022Publication date: February 29, 2024Inventors: Yun-Feng KAO, Chia Yu LING, Katherine H. CHIANG
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Publication number: 20240062817Abstract: A memory device, an operation method of a memory cell in a memory device and a semiconductor die are provided. A computational memory cell in the memory device includes: a field effect transistor (FET), with a changeable threshold voltage; and resistive storage devices, connected by a common terminal coupled to a source/drain terminal of the FET. By altering the threshold voltage of the FET, a logic function of the computational memory cell can be changed. During a logic operation, inputs are provided to the computational memory cell as resistance states of the resistive storage devices, and a current passing through a conduction channel of the FET is functioned as an output for the logic operation.Type: ApplicationFiled: August 22, 2022Publication date: February 22, 2024Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Katherine H. CHIANG
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Patent number: 11895832Abstract: A memory integrated circuit is provided. The memory integrated circuit includes a first memory array, a second memory array and a driving circuit. The first and second memory arrays are laterally spaced apart, and respectively include: memory cells, each including an access transistor and a storage capacitor coupled to the access transistor; bit lines, respectively coupled to a row of the memory cells; and word lines, respectively coupled to a column of the memory cells. The driving circuit is disposed below the first and second memory arrays, and includes sense amplifiers. Each of the bit lines in the first memory array and one of the bit lines in the second memory array are routed to input lines of one of the sense amplifiers.Type: GrantFiled: August 6, 2021Date of Patent: February 6, 2024Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Ming-Yen Chuang, Katherine H. Chiang, Chia-En Huang
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Patent number: 11895825Abstract: A semiconductor device includes an insulating base including a trench, a transistor including a gate electrode and vertical channel in the trench, and a source electrode in the insulating base outside the trench, an isolation layer on the gate electrode in the trench, and a capacitor including a trench capacitor portion that is on the isolation layer in the trench, and a stacked capacitor portion that is coupled to the source electrode of the transistor outside the trench.Type: GrantFiled: September 24, 2021Date of Patent: February 6, 2024Assignee: Taiwan Semiconductor Manufacturing Company LimitedInventors: Yun-Feng Kao, Katherine H. Chiang
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Publication number: 20240038294Abstract: Disclosed herein are related to a memory device. In one aspect, the memory device includes a memory array including a set of memory cells. In one aspect, each of the set of memory cells includes a corresponding transistor and a corresponding capacitor connected in series between a bit line and a select line. In one aspect, the memory device includes a first transistor including a source/drain electrode coupled to a controller and another source/drain electrode coupled to the bit line. In one aspect, the memory device includes a second transistor including a gate electrode coupled to the bit line. In one aspect, the second transistor is configured to conduct current corresponding to data stored by a memory cell of the set of memory cells.Type: ApplicationFiled: August 1, 2022Publication date: February 1, 2024Applicant: Taiwan Semiconductor Manufacturing Company Ltd.Inventors: Chen-Jun Wu, Yun-Feng Kao, Sheng-Chih Lai, Katherine H. Chiang, Chung-Te Lin
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Publication number: 20230378349Abstract: A semiconductor structure includes vertical stacks located over a substrate, wherein each of the vertical stacks includes from bottom to top, a bottom electrode, a dielectric pillar structure including a lateral opening therethrough, and a top electrode; layer stacks located over the vertical stacks, wherein each of the layer stacks includes an active layer and an outer gate dielectric and laterally surrounds a respective one of the vertical stacks; inner gate electrodes passing through a respective subset of the lateral openings in a respective row of vertical stacks that are arranged along a first horizontal direction; and outer gate electrodes laterally extending along the first horizontal direction and laterally surrounding a respective row of layer stacks.Type: ApplicationFiled: August 7, 2023Publication date: November 23, 2023Inventors: Ming-Yen CHUANG, Katherine H. CHIANG, Yun-Feng KAO
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Publication number: 20230343789Abstract: A semiconductor structure is provided. The semiconductor structure includes an interconnection structure, a first transistor, and a second transistor. The interconnection structure includes a first metal line layer, a second metal line layer and a third metal line layer arranged over one another. The first transistor includes a gate structure. The second transistor is disposed adjacent to the first transistor, and includes a source/drain structure. The gate structure of the first transistor is disposed over and electrically connected to the first metal line layer, and the source/drain structure of the second transistor is arranged below and electrically connected to the second metal line layer through the third metal line layer. A manufacturing method of a semiconductor structure is also provided.Type: ApplicationFiled: April 25, 2022Publication date: October 26, 2023Inventors: YUN-FENG KAO, KATHERINE H. CHIANG
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Publication number: 20230307351Abstract: A three-dimensional integrated structure and the manufacturing method(s) thereof are described. The three-dimensional integrated structure includes a substrate having conductive features therein, and a component array disposed over the substrate and on the conductive features. The component array includes a metallic material layer and capacitor structures separated by the metallic material layer. Each of the capacitor structures includes a first metallic pillar, a first dielectric sheath surrounding the first metallic pillar, a second metallic sheath surrounding the first dielectric sheath, and a second dielectric sleeve surrounding the second metallic sheath. The metallic material layer laterally encapsulates the capacitor structures.Type: ApplicationFiled: March 25, 2022Publication date: September 28, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Chien-Hao Huang, Gao-Ming Wu, Katherine H CHIANG
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Publication number: 20230301052Abstract: Various embodiments of the present application are directed towards a memory device including a memory cell. The memory cell includes a plurality of semiconductor devices disposed on a substrate. A lower inter-metal dielectric (IMD) structure overlies the semiconductor devices. A plurality of conductive vias and a plurality of conductive wires are disposed within the IMD structure and are electrically coupled to the semiconductor devices. A data backup unit overlies the plurality of conductive vias and wires. The data backup unit includes a first source/drain structure, a second source/drain structure, a channel layer, a first memory gate structure, and a second memory gate structure. The first and second memory gate structures include an upper gate electrode over a ferroelectric layer. The first and second source/drain structures are directly electrically coupled to the semiconductor devices by way of the conductive vias and wires.Type: ApplicationFiled: March 15, 2022Publication date: September 21, 2023Inventors: Yun-Feng Kao, Katherine H. Chiang
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Publication number: 20230269948Abstract: An active device, a semiconductor device and a semiconductor chip are provided. The active device includes: a channel layer; a top source/drain electrode, disposed at a top side of the channel layer; a first bottom source/drain electrode and a second bottom source/drain electrode, disposed at a bottom side of the channel layer; a first gate structure and a second gate structure, located between the top source/drain electrode and the first bottom source/drain electrode, wherein the first gate structure comprises a non-ferroelectric dielectric layer, and the second gate structure comprises a ferroelectric layer; and a third gate structure and a fourth gate structure, located between the top source/drain electrode and the second bottom source/drain electrode, wherein the third gate structure comprises a non-ferroelectric dielectric layer, and the fourth gate structure comprises a ferroelectric layer.Type: ApplicationFiled: February 18, 2022Publication date: August 24, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Katherine H. CHIANG
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Patent number: 11695039Abstract: Provided are a semiconductor device and method of forming the same. The semiconductor device includes active components and a first barrier pattern. The active components are on a substrate. Each of the active components includes base insulation patterns on the substrate, gate electrodes on the substrate and spaced apart from each other with the base insulation patterns interposed therebetween, a gate dielectric layer on the gate electrodes and the base insulation patterns, a channel pattern on the gate dielectric layer, source electrodes on the channel pattern and spaced apart from each other, a drain electrode on the channel pattern and between the source electrodes, and second insulation patterns between the source electrodes and the drain electrode. The first barrier pattern disposed on the gate dielectric layer surrounds the channel patterns, the source electrodes, the drain electrodes, and the second insulation patterns of each of the active components.Type: GrantFiled: July 30, 2021Date of Patent: July 4, 2023Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Huang, Gao-Ming Wu, Yun-Feng Kao, Ming-Yen Chuang, Katherine H. Chiang
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Publication number: 20230132910Abstract: A memory device having a capacitor structure and a method of forming the same are provided. The memory device includes a substrate; a dielectric layer disposed on the substrate; and a plurality of capacitor structures respectively disposed in the dielectric layer. Each capacitor structure includes: a cup-shaped lower electrode; a first upper electrode conformally covering an outer surface of the cup-shaped lower electrode; a first capacitor dielectric layer disposed between the outer surface of the cup-shaped lower electrode and the first upper electrode; a second upper electrode conformally covering an inner surface of the cup-shaped lower electrode, wherein the second upper electrode is electrically connected to the first upper electrode by at least one connection via; and a second capacitor dielectric layer disposed between the inner surface of the cup-shaped lower electrode and the second upper electrode.Type: ApplicationFiled: January 25, 2022Publication date: May 4, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Katherine H CHIANG
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Publication number: 20230046138Abstract: A physically unclonable function (PUF) device includes first and second inverters, each of which includes a common gate node and a common drain node. The common drain node of the first inverter is electrically connected to the common gate node of the second inverter. The PUF device also includes a common output node, a first resistive memory device (RMD) electrically connected to the common drain node of the first inverter and the common output node, and a second RMD electrically connected to the common drain node of the second inverter and the common output node.Type: ApplicationFiled: January 14, 2022Publication date: February 16, 2023Inventors: Yun-Feng KAO, Katherine H. CHIANG
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Publication number: 20230041409Abstract: A memory integrated circuit is provided. The memory integrated circuit includes a first memory array, a second memory array and a driving circuit. The first and second memory arrays are laterally spaced apart, and respectively include: memory cells, each including an access transistor and a storage capacitor coupled to the access transistor; bit lines, respectively coupled to a row of the memory cells; and word lines, respectively coupled to a column of the memory cells. The driving circuit is disposed below the first and second memory arrays, and includes sense amplifiers. Each of the bit lines in the first memory array and one of the bit lines in the second memory array are routed to input lines of one of the sense amplifiers.Type: ApplicationFiled: August 6, 2021Publication date: February 9, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Yun-Feng Kao, Ming-Yen Chuang, Katherine H. CHIANG, Chia-En Huang
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Publication number: 20230032528Abstract: Provided are a semiconductor device and method of forming the same. The semiconductor device includes active components and a first barrier pattern. The active components are on a substrate. Each of the active components includes base insulation patterns on the substrate, gate electrodes on the substrate and spaced apart from each other with the base insulation patterns interposed therebetween, a gate dielectric layer on the gate electrodes and the base insulation patterns, a channel pattern on the gate dielectric layer, source electrodes on the channel pattern and spaced apart from each other, a drain electrode on the channel pattern and between the source electrodes, and second insulation patterns between the source electrodes and the drain electrode. The first barrier pattern disposed on the gate dielectric layer surrounds the channel patterns, the source electrodes, the drain electrodes, and the second insulation patterns of each of the active components.Type: ApplicationFiled: July 30, 2021Publication date: February 2, 2023Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.Inventors: Chien-Hao Huang, Gao-Ming Wu, Yun-Feng Kao, Ming-Yen Chuang, Katherine H. Chiang
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Publication number: 20230019688Abstract: A disclosed capacitor structure includes a support structure including a plurality of elongated structures each extending along a longitudinal direction, a transverse direction, and a vertical direction. The plurality of elongated structures includes an alternating stack of first dielectric layers and second dielectric layers, a bottom electrode formed over the support structure, a third dielectric layer formed over the bottom electrode, and a top electrode formed over the third dielectric layer. Each of the first dielectric layers includes a first width along the transverse direction and each of the second dielectric layers includes a second width along the transverse direction. In various embodiments, the first width may be less than the second width such that each of the plurality of elongated structures include walls including a corrugated width profile as a function of distance along the vertical direction. The capacitor structure may be formed in a BEOL process.Type: ApplicationFiled: March 15, 2022Publication date: January 19, 2023Inventors: Yun-Feng Kao, Ming-Yen Chuang, Katherine H. Chiang, Chien-Hao HUANG
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Publication number: 20230008902Abstract: A semiconductor structure includes vertical stacks located over a substrate, wherein each of the vertical stacks includes from bottom to top, a bottom electrode, a dielectric pillar structure including a lateral opening therethrough, and a top electrode; layer stacks located over the vertical stacks, wherein each of the layer stacks includes an active layer and an outer gate dielectric and laterally surrounds a respective one of the vertical stacks; inner gate electrodes passing through a respective subset of the lateral openings in a respective row of vertical stacks that are arranged along a first horizontal direction; and outer gate electrodes laterally extending along the first horizontal direction and laterally surrounding a respective row of layer stacks.Type: ApplicationFiled: September 29, 2021Publication date: January 12, 2023Inventors: Ming-Yen CHUANG, Katherine H. CHIANG, Yun-Feng KAO