Abstract: Provided are a silicon carbide crystal growth device and a quality control method. The device includes: an annealing unit, a crystal growth unit, an atmosphere control unit, and a transport system; the atmosphere control unit provides a gas environment with low water, oxygen and nitrogen; the transport system transports a plurality of target objects after high-temperature purification by the annealing unit to the atmosphere control unit; after assembling silicon carbide seed crystal and silicon carbide powder in a graphite crucible and covering with thermal insulation material to form a container inside the atmosphere control unit, the transport system transports the container to the crystal growth unit. The method uses a weighing system in a chamber of the crystal growth unit to detect a weight change of silicon carbide seed crystal and silicon carbide powder during a crystal growth process through a plurality of weight sensors of the weighing system.

Abstract: A silicon carbide crystal growing apparatus includes a physical vapor transport unit and an atomic layer deposition unit. The physical vapor transport unit has a crystal growing furnace configured to grow a silicon carbide crystal in an internal space of the crystal growing furnace. The atomic layer deposition unit is coupled to the crystal growing furnace and configured to perform an atomic doping operation on the silicon carbide crystal. A silicon carbide crystal growing method is also provided.