Patents by Inventor Yun-Fu Chen

Yun-Fu Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SILICON CARBIDE CRYSTAL GROWING APPARATUS AND CRYSTAL GROWING METHOD THEREOF
    Publication number: 20210246573
    Abstract: A silicon carbide crystal growing apparatus includes a physical vapor transport unit and an atomic layer deposition unit. The physical vapor transport unit has a crystal growing furnace configured to grow a silicon carbide crystal in an internal space of the crystal growing furnace. The atomic layer deposition unit is coupled to the crystal growing furnace and configured to perform an atomic doping operation on the silicon carbide crystal. A silicon carbide crystal growing method is also provided.
    Type: Application
    Filed: May 4, 2020
    Publication date: August 12, 2021
    Applicant: Winsheng Material Technology (WMT) Co., Ltd.
    Inventors: Yun-Fu Chen, Chun-Sheng Peng, Min-Sheng Chu, Wei-Tse Hsu