Patents by Inventor Yun J. Huh

Yun J. Huh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Etch-ending point measuring method for wet-etch process
    Patent number: 5622636
    Abstract: A wet-etch method which determines a desired etch-ending point includes the steps of providing an etchant solution in a bath, perform a wet-etch process by dipping a material to be etched in the bath, measuring a PH variation value of the etchant solution during the wet-etch process, calculating a thickness variation value of the material by using the measured PH variation value, and stopping the wet-etch process when the thickness variation value reaches a preset value.
    Type: Grant
    Filed: May 7, 1996
    Date of Patent: April 22, 1997
    Assignee: LG Semicon Co., Ltd.
    Inventors: Yun J. Huh, Sang J. Choi, Suk B. Han