Patents by Inventor Yun-Ju CHIA

Yun-Ju CHIA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FILTER APPARATUS FOR SEMICONDUCTOR DEVICE FABRICATION PROCESS
    Publication number: 20210362291
    Abstract: A filter device includes one or more filter membranes, and a filter housing enclosing the one or more filter membranes. Each of the filter membranes includes a base membrane made of a ceramic material, and a plurality of through holes. The base membrane is coated with a coating material.
    Type: Application
    Filed: November 19, 2020
    Publication date: November 25, 2021
    Inventors: Chwen YU, Chih-Chiang TSENG, Yi-Chung LAI, Tzu-Sou CHUANG, Yun-Ju CHIA