Patents by Inventor Yun-Sek Oh

Yun-Sek Oh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF CLEANING SEMICONDUCTOR EQUIPMENT AND SEMICONDUCTOR EQUIPMENT MANAGEMENT SYSTEM
    Publication number: 20200164412
    Abstract: A method of cleaning semiconductor equipment includes monitoring a state of a fluid in a pipeline of the semiconductor equipment, constructing a database by using data collected through the monitoring, diagnosing a state of the pipeline based on the data collected through the monitoring and stored in the database, and cleaning the pipeline by using an ultrasound wave when the state of the pipeline is diagnosed as being abnormal. The pipeline is cleaned by using at least two ultrasound wave generators.
    Type: Application
    Filed: July 3, 2019
    Publication date: May 28, 2020
    Inventors: Kyoung-Whan Oh, Yun-Sek Oh, Ho-Youl Lee, Su-Man Park, Won-Ki Park, Young-Il Jang