Abstract: A cleaning apparatus including a vacuum cleaner and a docking station is provided. The cleaning apparatus includes a vacuum cleaner including a dust collecting chamber in which foreign substances are collected, and a docking station configured to be connected to the dust collecting chamber to remove the foreign substances collected in the dust collecting chamber. The dust collecting chamber is configured to collect foreign substances through centrifugation, and configured to be docked to the docking station, and the docking station includes a suction device configured to suction the foreign substances and air in the dust collecting chamber docked to the docking station.

Abstract: A protection circuit may include a first power line and a second power line, a plurality of high voltage interconnections, a plurality of low voltage interconnections, first and second pickup active regions, a high voltage protection transistor, and a low voltage protection transistor. The first power line and the second power line extending in parallel to each other while facing each other, and a plurality of high voltage interconnections are coupled to the first power line and extend toward the second power line while being spaced apart from each other. The plurality of low voltage interconnections are coupled to the second power line and extend toward the first power line while being spaced apart from each other. The first pickup active region extends across the plurality of high voltage interconnections and the second pickup active region extends across the plurality of low voltage interconnections.

Abstract: A protection circuit may include a first power line and a second power line, a plurality of high voltage interconnections, a plurality of low voltage interconnections, first and second pickup active regions, a high voltage protection transistor, and a low voltage protection transistor. The first power line and the second power line extending in parallel to each other while facing each other, and a plurality of high voltage interconnections are coupled to the first power line and extend toward the second power line while being spaced apart from each other. The plurality of low voltage interconnections are coupled to the second power line and extend toward the first power line while being spaced apart from each other. The first pickup active region extends across the plurality of high voltage interconnections and the second pickup active region extends across the plurality of low voltage interconnections.

Abstract: A dry cleaner easily and rapidly eliminates particles and dirt adhered to interior surfaces of the wafer carrier. The dry cleaner has a housing with a table mounted thereon, and an assembly for cleaning the wafer carriers disposed on the table. The cleaning assembly sprays a cleaning gas simultaneously into the carrier box and the cover of the wafer carrier. Dirt and particles separated from the carrier box and the cover are collected, by vacuum pressure through openings in the table, into a dirt-collector disposed in the housing, and then discharged through an exhaust tube. A controller controls a quantity of cleaning gas supplied and a time of cleaning by the cleaning assembly.