Patent number: 6833058
Abstract: The invention encompasses methods of forming titanium-based mixed-metal materials and zirconium-based mixed-metal materials utilizing one or more of a reduction process, electrolysis process and iodide process. The invention also encompasses a sputtering target comprising zirconium and one or more elements selected from the group consisting of Al, B, Ba, Be, Ca, Ce, Co, Cs, Dy, Er, Fe, Gd, Hf, Ho, La, Mg, Mn, Mo, Nb, Nd, Ni, Pr, Sc, Sm, Sr, Ta, Ti, V, W, Y, and Yb. The invention also encompasses a sputtering target comprising titanium and boron.
Type:
Grant
Filed:
October 24, 2000
Date of Patent:
December 21, 2004
Assignee:
Honeywell International Inc.
Inventors:
Stephen P. Turner, Joseph E. Green, Rodney L. Scagline, Yun Xu
Publication number: 20030132123
Abstract: The invention encompasses methods of forming titanium-based mixed-metal materials and zirconium-based mixed-metal materials utilizing one or more of a reduction process, electrolysis process and iodide process. The invention also encompasses a sputtering target comprising zirconium and one or more elements selected from the group consisting of Al, B, Ba, Be, Ca, Ce, Co, Cs, Dy, Er, Fe, Gd, Hf, Ho, La, Mg, Mn, Mo, Nb, Nd, Ni, Pr, Sc, Sm, Sr, Ta, Ti, V, W, Y, and Yb. The invention also encompasses a sputtering target comprising titanium and boron.
Type:
Application
Filed:
January 21, 2003
Publication date:
July 17, 2003
Inventors:
Stephen P. Turner, Joseph E. Green, Rodney L. Scagline, Yun Xu