Abstract: Described herein is a metrology system and a method for converting metrology data via a trained machine learning (ML) model. The method includes accessing a first (MD1) SEM data set (e.g., images, contours, etc.) acquired by a first scanning electron metrology (SEM) system (TS1) and a second (MD2) SEM data set acquired by a second SEM system (TS2), where the first SEM data set and the second SEM data set being associated with a patterned substrate. Using the first SEM data set and the second SEM data set as training data, a machine learning (ML) model is trained (P303) such that the trained ML model is configured to convert (P307) a metrology data set (310) acquired (P305) by the second SEM system to a converted data set (311) having characteristics comparable to metrology data being acquired by the first SEM system. Furthermore, measurements may be determined based on the converted SEM data.

Abstract: A method for improving a process model for a patterning process, the method including obtaining a) a measured contour from an image capture device, and b) a simulated contour generated from a simulation of the process model. The method also includes aligning the measured contour with the simulated contour by determining an offset between the measured contour and the simulated contour. The process model is calibrated to reduce a difference, computed based on the determined offset, between the simulated contour and the measured contour.

Abstract: A method for training a machine learning model to generate a predicted measured image, the method including obtaining (a) an input target image associated with a reference design pattern, and (b) a reference measured image associated with a specified design pattern printed on a substrate, wherein the input target image and the reference measured image are non-aligned images; and training, by a hardware computer system and using the input target image, the machine learning model to generate a predicted measured image.

Abstract: A method for improving a process model by measuring a feature on a printed design that was constructed based in part on a target design is disclosed. The method includes obtaining a) an image of the printed design from an image capture device and b) contours based on shapes in the image. The method also includes identifying, by a pattern recognition program, patterns on the target design that include the feature and determining coordinates, on the contours, that correspond to the feature. The method further includes improving the process model by at least a) providing a measurement of the feature based on the coordinates and b) calibrating the process model based on a comparison of the measurement with a corresponding feature in the target design.

Abstract: A method for improving a process model by measuring a feature on a printed design that was constructed based in part on a target design is disclosed. The method includes obtaining a) an image of the printed design from an image capture device and b) contours based on shapes in the image. The method also includes identifying, by a pattern recognition program, patterns on the target design that include the feature and determining coordinates, on the contours, that correspond to the feature. The method further includes improving the process model by at least a) providing a measurement of the feature based on the coordinates and b) calibrating the process model based on a comparison of the measurement with a corresponding feature in the target design.

Abstract: Methods and systems for highly-sensitive label-free multiple analyte sensing, biosensing, and diagnostic assay are disclosed. The systems comprise an on-chip integrated two-dimensional photonic crystal sensor chip. The invention provides modulation methods, wavelength modulation and intensity modulation, to monitor the resonance mode shift of the photonic crystal microarray device and further provides methods and systems that enable detection and identification of multiple species to be performed simultaneously with one two-dimensional photonic crystal sensor chip device for high throughput chemical sensing, biosensing, and medical diagnostics. Other embodiments are described and claimed.

Abstract: A method for improving a process model for a patterning process, the method including obtaining a) a measured contour from an image capture device, and b) a simulated contour generated from a simulation of the process model. The method also includes aligning the measured contour with the simulated contour by determining an offset between the measured contour and the simulated contour. The process model is calibrated to reduce a difference, computed based on the determined offset, between the simulated contour and the measured contour.

Abstract: Methods and systems for highly-sensitive label-free multiple analyte sensing, biosensing, and diagnostic assay are disclosed. The systems comprise an on-chip integrated two-dimensional photonic crystal sensor chip. The invention provides modulation methods, wavelength modulation and intensity modulation, to monitor the resonance mode shift of the photonic crystal microarray device and further provides methods and systems that enable detection and identification of multiple species to be performed simultaneously with one two-dimensional photonic crystal sensor chip device for high throughput chemical sensing, biosensing, and medical diagnostics. Other embodiments are described and claimed.

Abstract: Methods and systems for highly-sensitive label-free multiple analyte sensing, biosensing, and diagnostic assay are disclosed. The systems comprise an on-chip integrated two-dimensional photonic crystal sensor chip. The invention provides modulation methods, wavelength modulation and intensity modulation, to monitor the resonance mode shift of the photonic crystal microarray device and further provides methods and systems that enable detection and identification of multiple species to be performed simultaneously with one two-dimensional photonic crystal sensor chip device for high throughput chemical sensing, biosensing, and medical diagnostics. Other embodiments are described and claimed.

Abstract: 3-dimensional surface-enhanced Raman scattering (SERS), as well as absorption/fluorescence/luminescence detection is carried out using a platform based on nanoparticle-functionalized flow-through multi-hole capillaries for rapid analyte detection. The configuration provides an increased active area and fluidic channels for efficient sample delivery, and also confines and transmits light for a large signal accumulation. Using a capillary consisting of thousands of micron-sized holes adsorbed with gold nanoparticles, a detection limit better than 100 fM is achieved.

Abstract: A photonic crystal-metallic (PCM) structure receives an input light signal from a light source. The PCM structure includes a metal structure and a photonic crystal structure disposed adjacent the metal structure. The photonic crystal structure is configured to receive the input light signal such that the input light signal excites surface plasmons of the metallic structure and such that the input light signal is internally reflected within the photonic crystal structure.

Abstract: Devices, methods and systems based on integrated photonic crystal structures are disclosed. An integrated photonic crystal structure includes a photonic crystal structure and a defect member disposed adjacent the photonic crystal structure. The defect member includes a photoconductive material. The integrated photonic crystal structure is configured to receive an input light signal such that the input light signal is internally reflected within the photonic crystal structure and the defect member, such that the input light signal is absorbed by the photoconductive material in the defect member, and such that a property of the photoconductive material is changed to thereby output an output signal.

Abstract: A self-referencing composite Fabry-Pérot cavity sensor, including methods of use and manufacture. The cavity sensor comprises a substrate defining a first cavity portion juxtaposed to a second cavity portion. The first and second cavity portions are provided having a predetermined depth offset. A polymer or other dielectric material is disposed within the first and second cavity portions. An interference spectrum resulting from a light source of a known wavelength is reflected through the sensor and produces a first refractive index from the first cavity portion offset by a second refractive index from the second cavity portion. The difference in refractive indices can be used to determine various physical parameters. An optical sensor according to the present technology may be used with vapor sensing, pressure sensing, protein detection, photo-acoustic imaging, and the like.

Abstract: Apparatuses comprising an integrated printed decorative image with a printed antenna structure and/or printed electronic circuits are disclosed. In one embodiment, the apparatus comprises a printed decorative image atop the layer of the printed antenna structure, wherein the printed antenna structure is substantially concealed by the printed decorative image. Other embodiments are described and claimed.

Abstract: Methods and systems for highly-sensitive label-free multiple analyte sensing, biosensing, and diagnostic assay are disclosed. The systems comprise an on-chip integrated two-dimensional photonic crystal sensor chip. The invention provides modulation methods, wavelength modulation and intensity modulation, to monitor the resonance mode shift of the photonic crystal microarray device and further provides methods and systems that enable detection and identification of multiple species to be performed simultaneously with one two-dimensional photonic crystal sensor chip device for high throughput chemical sensing, biosensing, and medical diagnostics. Other embodiments are described and claimed.

Abstract: 3-dimensional surface-enhanced Raman scattering (SERS), as well as absorption/fluorescence/luminescence detection is carried out using a platform based on nanoparticle-functionalized flow-through multi-hole capillaries for rapid analyte detection. The configuration provides an increased active area and fluidic channels for efficient sample delivery, and also confines and transmits light for a large signal accumulation. Using a capillary consisting of thousands of micron-sized holes adsorbed with gold nanoparticles, a detection limit better than 100 fM is achieved.

Abstract: Devices, methods and systems based on integrated photonic crystal structures are disclosed. An integrated photonic crystal structure includes a photonic crystal structure and a defect member disposed adjacent the photonic crystal structure. The defect member includes a photoconductive material. The integrated photonic crystal structure is configured to receive an input light signal such that the input light signal is internally reflected within the photonic crystal structure and the defect member, such that the input light signal is absorbed by the photoconductive material in the defect member, and such that a property of the photoconductive material is changed to thereby output an output signal.

Abstract: A photonic crystal-metallic (PCM) structure receives an input light signal from a light source. The PCM structure includes a metal structure and a photonic crystal structure disposed adjacent the metal structure. The photonic crystal structure is configured to receive the input light signal such that the input light signal excites surface plasmons of the metallic structure and such that the input light signal is internally reflected within the photonic crystal structure.

Abstract: A photonic crystal sensor for outputting an output signal using a light source. The photonic crystal sensor includes a photonic crystal structure and a defect member disposed adjacent the photonic crystal structure. The defect member defines an operative surface. An input light signal from the light source is inputted to the photonic crystal structure and defect member and is internally reflected to thereby output the output signal. Also, the output signal relates to a condition at the operative surface.

Abstract: A photonic crystal sensor for outputting an output signal using a light source. The photonic crystal sensor includes a photonic crystal structure and a defect member disposed adjacent the photonic crystal structure. The defect member defines an operative surface. An input light signal from the light source is inputted to the photonic crystal structure and defect member and is internally reflected to thereby output the output signal. Also, the output signal relates to a condition at the operative surface.