Patents by Inventor Yung-Chang LU

Yung-Chang LU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing apparatus and method of operating the same
    Patent number: 9793143
    Abstract: Embodiments of a semiconductor processing apparatus are provided. The semiconductor processing apparatus includes a housing and a support base disposed in the housing. The semiconductor processing apparatus also includes a carrying arm movably disposed on the support base and a nozzle device disposed on the carrying arm. The semiconductor processing apparatus further includes a wafer plate disposed on the support base. When a cleaning process is performed, the carrying arm is moved toward the wafer plate, and the nozzle device emits a first gas toward the support base and the wafer plate.
    Type: Grant
    Filed: January 6, 2014
    Date of Patent: October 17, 2017
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Ching-Hai Yang, Yao-Hwan Kao, Shang-Sheng Li, Yung-Chang Lu, Jian-Yuan Lai, Kai-Yuan Cheng
  • SEMICONDUCTOR PROCESSING APPARATUS AND METHOD OF OPERATING THE SAME
    Publication number: 20150194325
    Abstract: Embodiments of a semiconductor processing apparatus are provided. The semiconductor processing apparatus includes a housing and a support base disposed in the housing. The semiconductor processing apparatus also includes a carrying arm movably disposed on the support base and a nozzle device disposed on the carrying arm. The semiconductor processing apparatus further includes a wafer plate disposed on the support base. When a cleaning process is performed, the carrying arm is moved toward the wafer plate, and the nozzle device emits a first gas toward the support base and the wafer plate.
    Type: Application
    Filed: January 6, 2014
    Publication date: July 9, 2015
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Ching-Hai YANG, Yao-Hwan KAO, Shang-Sheng LI, Yung-Chang LU, Jian-Yuan LAI, Kai-Yuan CHENG