Patents by Inventor Yung-Fa LEE
Yung-Fa LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10361287Abstract: A method of manufacturing a semiconductor device includes receiving a FinFET precursor including a fin structure formed between some isolation regions, and a gate structure formed over a portion of the fin structure; removing a top portion of the fin structure on either side of the gate structure; growing a semiconductive layer on top of a remaining portion of the fin structure such that a plurality of corners is formed over the fin structure; forming a capping layer over the semiconductive layer; performing an annealing process on the FinFET precursor to form a plurality of dislocations proximate to the corners; and removing the capping layer.Type: GrantFiled: September 9, 2016Date of Patent: July 23, 2019Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: I-Chih Chen, Chih-Ming Hsieh, Fu-Tsun Tsai, Yung-Fa Lee, Chih-Mu Huang
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Patent number: 10096672Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.Type: GrantFiled: July 17, 2017Date of Patent: October 9, 2018Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: I-Chih Chen, Chih-Mu Huang, Fu-Tsun Tsai, Meng-Yi Wu, Yung-Fa Lee, Ying-Lang Wang
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Publication number: 20170317164Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.Type: ApplicationFiled: July 17, 2017Publication date: November 2, 2017Inventors: I-Chih CHEN, Chih-Mu HUANG, Fu-Tsun TSAI, Meng-Yi WU, Yung-Fa LEE, Ying-Lang WANG
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Patent number: 9768132Abstract: A semiconductor structure includes a substrate, a bond pad over the substrate, and a passivation layer over the substrate and a peripheral region of the bond pad. The bond pad has a bonding region and the peripheral region surrounding the bonding region. The passivation layer has an opening defined therein, and the opening exposes the bonding region of the bond pad. A first vertical distance between an upper surface of the passivation layer and a surface of the bonding region ranges from 30% to 40% of a second vertical distance between a lower surface of the passivation layer and an upper surface of the peripheral region.Type: GrantFiled: March 14, 2012Date of Patent: September 19, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ling Mei Lin, Chun Li Wu, Yung-Fa Lee
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Patent number: 9728598Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.Type: GrantFiled: April 7, 2015Date of Patent: August 8, 2017Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: I-Chih Chen, Chih-Mu Huang, Fu-Tsun Tsai, Meng-Yi Wu, Yung-Fa Lee, Ying-Lang Wang
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Publication number: 20160380085Abstract: A method of manufacturing a semiconductor device includes receiving a FinFET precursor including a fin structure formed between some isolation regions, and a gate structure formed over a portion of the fin structure; removing a top portion of the fin structure on either side of the gate structure; growing a semiconductive layer on top of a remaining portion of the fin structure such that a plurality of corners is formed over the fin structure; forming a capping layer over the semiconductive layer; performing an annealing process on the FinFET precursor to form a plurality of dislocations proximate to the corners; and removing the capping layer.Type: ApplicationFiled: September 9, 2016Publication date: December 29, 2016Inventors: I-CHIH CHEN, CHIH-MING HSIEH, FU-TSUN TSAI, YUNG-FA LEE, CHIH-MU HUANG
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Patent number: 9490345Abstract: A semiconductor device includes a gate structure on a substrate; a raised source/drain region adjacent to the gate structure; and an interconnect plug on the doped region. The raised source/drain region includes a top surface being elevated from a surface of the substrate; and a doped region exposed on the top surface. The doped region includes a dopant concentration greater than any other portions of the raised source/drain region. A bottommost portion of the interconnect plug includes a width approximate to a width of the doped region.Type: GrantFiled: October 31, 2014Date of Patent: November 8, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: I-Chih Chen, Fu-Tsun Tsai, Yung-Fa Lee, Ko-Min Lin, Chih-Mu Huang, Ying-Lang Wang
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Publication number: 20160300906Abstract: A semiconductor device includes a semiconductor substrate having a first conductivity type region including a first conductivity type impurity. A first gate structure is on the semiconductor substrate overlying the first conductivity type region. A second conductivity type region including a second conductivity type impurity is formed in the semiconductor substrate. A barrier layer is located between the first conductivity type region and the second conductivity type region. The barrier layer prevents diffusion of the second conductivity type impurity from the second conductivity type region into the first conductivity type region.Type: ApplicationFiled: April 7, 2015Publication date: October 13, 2016Inventors: I-Chih CHEN, Chih-Mu HUANG, Fu-Tsun TSAI, Meng-Yi WU, Yung-Fa LEE, Ying-Lang WANG
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Patent number: 9450093Abstract: Some embodiments of the present disclosure provide a method of manufacturing a semiconductor device including receiving a FinFET precursor including a fin structure formed between isolation regions, and a gate structure formed over a portion of the fin structure such that a sidewall of the fin structure is in contact with a gate spacer of the gate structure; patterning the fin structure to comprise a pattern of at least one upward step rising from the isolation region; forming a capping layer over the fin structure, the isolation region, and the gate structure; performing an annealing process on the FinFET precursor to form at least two dislocations along the upward step; and removing the capping layer.Type: GrantFiled: October 15, 2014Date of Patent: September 20, 2016Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.Inventors: I-Chih Chen, Chih-Ming Hsieh, Fu-Tsun Tsai, Yung-Fa Lee, Chih-Mu Huang
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Publication number: 20160111536Abstract: Some embodiments of the present disclosure provide a method of manufacturing a semiconductor device including receiving a FinFET precursor including a fin structure formed between isolation regions, and a gate structure formed over a portion of the fin structure such that a sidewall of the fin structure is in contact with a gate spacer of the gate structure; patterning the fin structure to comprise a pattern of at least one upward step rising from the isolation region; forming a capping layer over the fin structure, the isolation region, and the gate structure; performing an annealing process on the FinFET precursor to form at least two dislocations along the upward step; and removing the capping layer.Type: ApplicationFiled: October 15, 2014Publication date: April 21, 2016Inventors: I-CHIH CHEN, CHIH-MING HSIEH, FU-TSUN TSAI, YUNG-FA LEE, CHIH-MU HUANG
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Publication number: 20150206946Abstract: A semiconductor device includes a gate structure on a substrate; a raised source/drain region adjacent to the gate structure; and an interconnect plug on the doped region. The raised source/drain region includes a top surface being elevated from a surface of the substrate; and a doped region exposed on the top surface. The doped region includes a dopant concentration greater than any other portions of the raised source/drain region. A bottommost portion of the interconnect plug includes a width approximate to a width of the doped region.Type: ApplicationFiled: October 31, 2014Publication date: July 23, 2015Inventors: I-CHIH CHEN, FU-TSUN TSAI, YUNG-FA LEE, KO-MIN LIN, CHIH-MU HUANG, YING-LANG WANG
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Publication number: 20130241064Abstract: A semiconductor structure includes a substrate, a bond pad over the substrate, and a passivation layer over the substrate and a peripheral region of the bond pad. The bond pad has a bonding region and the peripheral region surrounding the bonding region. The passivation layer has an opening defined therein, and the opening exposes the bonding region of the bond pad. A first vertical distance between an upper surface of the passivation layer and a surface of the bonding region ranges from 30% to 40% of a second vertical distance between a lower surface of the passivation layer and an upper surface of the peripheral region.Type: ApplicationFiled: March 14, 2012Publication date: September 19, 2013Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.Inventors: Ling Mei LIN, Chun Li WU, Yung-Fa LEE