Patents by Inventor Yung-Lun Hsieh
Yung-Lun Hsieh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8999793Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from inner to outer. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.Type: GrantFiled: June 17, 2014Date of Patent: April 7, 2015Assignee: United Microelectronics Corp.Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Publication number: 20140295634Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from inner to outer. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.Type: ApplicationFiled: June 17, 2014Publication date: October 2, 2014Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Patent number: 8828745Abstract: A method for manufacturing TSVs, wherein the method comprises several steps as follows: A stack structure having a substrate and an ILD layer (inter layer dielectric layer) is provided, in which an opening penetrating through the ILD layer and further extending into the substrate is formed. After an insulator layer and a metal barrier layer are formed on the stack structure and the sidewalls of the opening, a top metal layer is then formed on the stack structure to fulfill the opening. A first planarization process stopping on the barrier layer is conducted to remove a portion of the top metal layer. A second planarization process stopping on the ILD layer is subsequently conducted to remove a portion of the metal barrier layer, a portion of the insulator layer and a portion of the top metal layer, wherein the second planarization process has a polishing endpoint determined by a light interferometry or a motor current.Type: GrantFiled: July 6, 2011Date of Patent: September 9, 2014Assignee: United Microelectronics Corp.Inventors: Wei-Che Tsao, Chia-Lin Hsu, Jen-Chieh Lin, Teng-Chun Tsai, Hsin-Kuo Hsu, Ya-Hsueh Hsieh, Ren-Peng Huang, Chih-Hsien Chen, Wen-Chin Lin, Yung-Lun Hsieh
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Patent number: 8796695Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from bottom to top. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.Type: GrantFiled: June 22, 2012Date of Patent: August 5, 2014Assignee: United Microelectronics Corp.Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Patent number: 8709910Abstract: A semiconductor process includes the following steps. A semiconductor substrate is provided. The semiconductor substrate has a patterned isolation layer and the patterned isolation layer has an opening exposing a silicon area of the semiconductor substrate. A silicon rich layer is formed on the sidewalls of the opening. An epitaxial process is performed to form an epitaxial structure on the silicon area in the opening.Type: GrantFiled: April 30, 2012Date of Patent: April 29, 2014Assignee: United Microelectronics Corp.Inventors: Chin-I Liao, Chia-Lin Hsu, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee, Min-Chung Cheng
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Patent number: 8674433Abstract: A semiconductor process includes the following steps. A substrate is provided. At least a fin-shaped structure is formed on the substrate. An oxide layer is formed on the substrate without the fin-shaped structure being formed thereon. A gate is formed to cover a part of the oxide layer and a part of the fin-shaped structure. An etching process is performed to etch a part of the fin-shaped structure beside the gate, therefore at least a recess is formed in the fin-shaped structure. An epitaxial process is performed to form an epitaxial layer in the recess, wherein the epitaxial layer has a hexagon-shaped profile structure.Type: GrantFiled: August 24, 2011Date of Patent: March 18, 2014Assignee: United Microelectronics Corp.Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Hsin-Huei Wu, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Publication number: 20130341638Abstract: A Multi-Gate Field-Effect Transistor includes a fin-shaped structure, a gate structure, at least an epitaxial structure and a gradient cap layer. The fin-shaped structure is located on a substrate. The gate structure is disposed across a part of the fin-shaped structure and the substrate. The epitaxial structure is located on the fin-shaped structure beside the gate structure. The gradient cap layer is located on each of the epitaxial structures. The gradient cap layer is a compound semiconductor, and the concentration of one of the ingredients of the compound semiconductor has a gradient distribution decreasing from bottom to top. Moreover, the present invention also provides a Multi-Gate Field-Effect Transistor process forming said Multi-Gate Field-Effect Transistor.Type: ApplicationFiled: June 22, 2012Publication date: December 26, 2013Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Publication number: 20130288448Abstract: A semiconductor process includes the following steps. A semiconductor substrate is provided. The semiconductor substrate has a patterned isolation layer and the patterned isolation layer has an opening exposing a silicon area of the semiconductor substrate. A silicon rich layer is formed on the sidewalls of the opening. An epitaxial process is performed to form an epitaxial structure on the silicon area in the opening.Type: ApplicationFiled: April 30, 2012Publication date: October 31, 2013Inventors: Chin-I Liao, Chia-Lin Hsu, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee, Min-Chung Cheng
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Publication number: 20130122698Abstract: A method for manufacturing multi-gate transistor device includes providing a semiconductor substrate having a patterned semiconductor layer and a patterned hard mask sequentially formed thereon, removing the patterned hard mask, performing a thermal treatment to rounding the patterned semiconductor layer with a process temperature lower than 800° C., and sequentially forming a gate dielectric layer and a gate layer covering a portion of the patterned semiconductor layer on the semiconductor substrate.Type: ApplicationFiled: November 16, 2011Publication date: May 16, 2013Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Min-Ying Hsu, Hsin-Huei Wu, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Patent number: 8440511Abstract: A method for manufacturing multi-gate transistor device includes providing a semiconductor substrate having a patterned semiconductor layer and a patterned hard mask sequentially formed thereon, removing the patterned hard mask, performing a thermal treatment to rounding the patterned semiconductor layer with a process temperature lower than 800° C., and sequentially forming a gate dielectric layer and a gate layer covering a portion of the patterned semiconductor layer on the semiconductor substrate.Type: GrantFiled: November 16, 2011Date of Patent: May 14, 2013Assignee: United Microelectronics Corp.Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Min-Ying Hsu, Hsin-Huei Wu, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Publication number: 20130052778Abstract: A semiconductor process includes the following steps. A substrate is provided. At least a fin-shaped structure is formed on the substrate. An oxide layer is formed on the substrate without the fin-shaped structure being formed thereon. A gate is formed to cover a part of the oxide layer and a part of the fin-shaped structure. An etching process is performed to etch a part of the fin-shaped structure beside the gate, therefore at least a recess is formed in the fin-shaped structure. An epitaxial process is performed to form an epitaxial layer in the recess, wherein the epitaxial layer has a hexagon-shaped profile structure.Type: ApplicationFiled: August 24, 2011Publication date: February 28, 2013Inventors: Chin-I Liao, Chia-Lin Hsu, Ming-Yen Li, Hsin-Huei Wu, Yung-Lun Hsieh, Chien-Hao Chen, Bo-Syuan Lee
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Publication number: 20130011938Abstract: A method for manufacturing TSVs, wherein the method comprises several steps as follows: A stack structure having a substrate and an ILD layer (inter layer dielectric layer) is provided, in which an opening penetrating through the ILD layer and further extending into the substrate is formed. After an insulator layer and a metal barrier layer are formed on the stack structure and the sidewalls of the opening, a top metal layer is then formed on the stack structure to fulfill the opening. A first planarization process stopping on the barrier layer is conducted to remove a portion of the top metal layer. A second planarization process stopping on the ILD layer is subsequently conducted to remove a portion of the metal barrier layer, a portion of the insulator layer and a portion of the top metal layer, wherein the second planarization process has a polishing endpoint determined by a light interferometry or a motor current.Type: ApplicationFiled: July 6, 2011Publication date: January 10, 2013Applicant: UNITED MICROELECTRONICS CORP.Inventors: Wei-Che TSAO, Chia-Lin Hsu, Jen-Chieh Lin, Teng-Chun Tsai, Hsin-Kuo Hsu, Ya-Hsueh Hsieh, Ren-Peng Huang, Chih-Hsien Chen, Wen-Chin Lin, Yung-Lun Hsieh