Abstract: Embodiment methods for performing a high pressure anneal process during the formation of a semiconductor device, and embodiment devices therefor, are provided. The high pressure anneal process may be a dry high pressure anneal process in which a pressurized environment of the anneal includes one or more process gases. The high pressure anneal process may be a wet anneal process in which a pressurized environment of the anneal includes steam.

Abstract: Embodiment methods for performing a high pressure anneal process during the formation of a semiconductor device, and embodiment devices therefor, are provided. The high pressure anneal process may be a dry high pressure anneal process in which a pressurized environment of the anneal includes one or more process gases. The high pressure anneal process may be a wet anneal process in which a pressurized environment of the anneal includes steam.

Abstract: Embodiment methods for performing a high pressure anneal process during the formation of a semiconductor device, and embodiment devices therefor, are provided. The high pressure anneal process may be a dry high pressure anneal process in which a pressurized environment of the anneal includes one or more process gases. The high pressure anneal process may be a wet anneal process in which a pressurized environment of the anneal includes steam.

Abstract: Embodiment methods for performing a high pressure anneal process during the formation of a semiconductor device, and embodiment devices therefor, are provided. The high pressure anneal process may be a dry high pressure anneal process in which a pressurized environment of the anneal includes one or more process gases. The high pressure anneal process may be a wet anneal process in which a pressurized environment of the anneal includes steam.

Abstract: In accordance with an embodiment, described herein is a system and method for integrating a transactional middleware platform with a centralized audit framework for a SOA middleware platform. An audit provider in the centralized audit framework can be provided as a plug-in module to the transactional middleware platform, and registered as an internal audit service therein. The internal audit service can be advertised on an audit server, and can process audit requests from within the transactional middleware platform. One or more configuration files can be provided to the audit provider, for use in generating audit data for audit events occurring in one or more components in the transactional middleware platform. The audit provider itself can be configured to represent an audit aware component within the centralized audit framework, thereby utilizing a plurality of functionalities available in the centralized audit framework, including saving the audit data in a central data store.