Abstract: A method of controlling a physical quantity of a semiconductor manufacturing facility includes performing feedforward control including control of a first stage feedforward to accelerate a physical quantity control system to a physical limit performance and control of a second stage feedforward to reduce acceleration of the physical quantity control system at a first switching point, switching the feedforward control to feedback control at a second switching point, and performing feedback control on the physical quantity control system.

Abstract: A cooling system for semiconductor equipment includes a chamber, an electrostatic chuck in the chamber, a coolant pipe housing in at least one of the chamber and the electrostatic chuck, the coolant pipe housing having an internal space, a coolant pipe at least partially in the internal space of the coolant pipe housing, and a flow controller configured to control a flow velocity of the coolant flowing along the coolant pipe so that the flow velocity periodically reaches a highest speed and a lowest speed.

Abstract: A method of processing a substrate includes disposing a substrate in a substrate processing apparatus and polishing the substrate. The substrate processing apparatus includes a polishing head and a polishing part. The polishing head includes a polishing head body. The polishing head body includes a pressure member including a first zone and a second zone. The substrate includes a first substrate zone located under the first zone and a second substrate zone located under the second zone. The polishing of the substrate includes rotating the substrate while applying a (1,1)-th pressure to the first substrate zone and applying a (2,1)-th pressure to the second substrate zone, calculating a (1,1)-th polishing rate of the first substrate zone and a (2,1)-th polishing rate of the second substrate zone, determining a reference polishing rate, and resetting a pressure applied to the first substrate zone to a (1,2)-th pressure.

Abstract: A touch screen panel includes a sensing electrode area, a pad area, and a peripheral wiring area. The sensing electrode area includes first sensing electrodes and second sensing electrodes on a touch substrate and spaced from each other. The peripheral wiring area connects the sensing electrode area to the pad area. Each of the first sensing electrodes includes a first sensing metal layer on the touch substrate, a sensing insulation layer on the first sensing metal layer, and a second sensing metal layer on the sensing insulation layer and having a mesh structure. The second sensing metal layer is thicker than the first sensing metal layer.

Abstract: A touch screen panel includes a sensing electrode area, a pad area, and a peripheral wiring area. The sensing electrode area includes first sensing electrodes and second sensing electrodes on a touch substrate and spaced from each other. The peripheral wiring area connects the sensing electrode area to the pad area. Each of the first sensing electrodes includes a first sensing metal layer on the touch substrate, a sensing insulation layer on the first sensing metal layer, and a second sensing metal layer on the sensing insulation layer and having a mesh structure. The second sensing metal layer is thicker than the first sensing metal layer.

Abstract: A low-fuel consumption and low-pollution combustion system supplies an engine with a mixture, in which oxygen contained in air is separated from nitrogen through a PSA (pressure swing adsorption) whereby oxygen having purity above 95% and a fuel mixture is fed into and burned in the combustion chamber obtaining a desired engine output with low-fuel consumption. Nitrogen is previously removed so that nitride oxide can be minimized during combustion procedure and CO and toxic gas derived from incomplete combustion can be minimized. The system obtains high engine output and low-fuel consumption by reducing toxic gas derived from incomplete combustion. The system includes an oxygen separator for separating oxygen from nitrogen by introducing external air into adsorption towers with predetermined pressure while storing the oxygen separated from the nitrogen in an oxygen storage tank and exhausting the nitrogen.

Abstract: A low-fuel consumption and low-pollution combustion system supplies an engine with a mixture, in which oxygen contained in air is separated from nitrogen through a PSA (pressure swing adsorption) whereby oxygen having purity above 95% and a fuel mixture is fed into and burned in the combustion chamber obtaining a desired engine output with low-fuel consumption. Nitrogen is previously removed so that nitride oxide can be minimized during combustion procedure and CO and toxic gas derived from incomplete combustion can be minimized. The system obtains high engine output and low-fuel consumption by reducing toxic gas derived from incomplete combustion. The system includes an oxygen separator for separating oxygen from nitrogen by introducing external air into adsorption towers with predetermined pressure while storing the oxygen separated from the nitrogen in an oxygen storage tank and exhausting the nitrogen.