Abstract: A method and a device for preparing MoF6 based on plasma activation of SF6. The method includes the following steps: S1, filling a discharge area of a plasma reactor with molybdenum powder; S2, introducing an inert gas and an SF6 gas into the discharge area of the plasma reactor, where the inert gas is ionized into plasma, and the SF6 gas is ionized into fluorine atoms and low-fluorine sulfides after being activated by the plasma; and S3, generating an MoF6 gas and sulfur elements through reaction of the fluorine atoms and the low-fluorine sulfides with the molybdenum powder.

Abstract: Disclosed are a device of complex gas mixture detection based on optical-path-adjustable spectrum detection and a method therefor, and the device includes: a light source configured for generating an incident beam and emitting the incident beam into an optical gas cell; the optical gas cell, including a cavity configured for accommodating a gas sample, and a reflection module group configured for reflecting the incident beam and a track arranged in the cavity, where the track is consistent with a light path of the light beam in the cavity; a detector module that is connected with the track in a relatively movable manner and is configured for receiving light beams and obtaining spectral data, where an optical path is changed by moving the detector module relative to the track; and a data acquisition unit that is configured for acquiring the spectral data obtained by the detector module.