Patents by Inventor Yunju CHAE

Yunju CHAE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • HARDMASK COMPOSITION, HARDMASK LAYER AND METHOD OF FORMING PATTERNS
    Publication number: 20240309238
    Abstract: A hardmask composition, a hardmask layer including a cured product of the hardmask composition, and a method of forming patterns using the hardmask layer including a cured product of the hardmask composition, the hardmask composition includes a polymer including a structural unit represented by Chemical Formula 1; and a solvent: *A-B*??[Chemical Formula 1]
    Type: Application
    Filed: January 23, 2024
    Publication date: September 19, 2024
    Inventor: Yunju Chae
  • HARDMASK COMPOSITION, HARDMASK LAYER, AND METHOD OF FORMING PATTERNS
    Publication number: 20230101786
    Abstract: Provided are a hardmask composition including a polymer including a structural unit represented by Chemical Formula 1 and a structural unit represented by Chemical Formula 2, and a solvent, a hardmask layer manufactured from the hardmask composition, and a method of forming patterns from the hardmask composition, wherein the definitions of Chemical Formula 1 and Chemical Formula 2 are as described in the specification.
    Type: Application
    Filed: August 23, 2022
    Publication date: March 30, 2023
    Inventors: Hyejeong KIM, Soohee KIM, Yoona KIM, Hyungseok PARK, Huichan YUN, Jaechul LEE, Jonghwa LEE, Seulgi JEONG, Yunju CHAE, Won Jong HWANG