Abstract: A method of inspecting a temperature controlling system is provided. The method includes generating a measurement matrix based on current measurement values of the temperature controlling system, calculating a transformation matrix having the same dimensions as the measurement matrix based on the measurement matrix, calculating an auxiliary matrix having the same dimensions as the measurement matrix based on the transformation matrix, and calculating a defect matrix representing defective diodes among the plurality of diodes, based on a difference operation between the auxiliary matrix and the transformation matrix.

Abstract: Disclosed is a substrate treating apparatus including a chamber having a process space therein in which a substrate is treated, a substrate support assembly located in the chamber and including a support plate that supports the substrate, a gas supply unit that supplies gas into the chamber, a gas distribution plate that distributes the gas and supplies the gas into the process space, and a temperature control unit that controls temperature of the gas distribution plate. The temperature control unit includes a heating member that heats the gas distribution plate, a cooling member that cools the gas distribution plate, and a control member that controls the heating member and the cooling member, based on a correlation coefficient regarding an interaction of the heating member and the cooling member and a disturbance coefficient regarding an external influence.

Abstract: Disclosed is a substrate treating apparatus including a chamber having a process space therein in which a substrate is treated, a substrate support assembly located in the chamber and including a support plate that supports the substrate, a gas supply unit that supplies gas into the chamber, a gas distribution plate that distributes the gas and supplies the gas into the process space, and a temperature control unit that controls temperature of the gas distribution plate. The temperature control unit includes a heating member that heats the gas distribution plate, a cooling member that cools the gas distribution plate, and a control member that controls the heating member and the cooling member, based on a correlation coefficient regarding an interaction of the heating member and the cooling member and a disturbance coefficient regarding an external influence.

Abstract: First and second controllers output respective first and second control signals for first and second plants that respectively correspond to the stages of an actuator. An inverse model of the first plant used to determine a decoupled output of the second plant from a combined output of the first and second plants. A disturbance estimate is subtracted from the second control signal to obtain a disturbance-corrected output. A loop-shaping filter is used between the disturbance corrected output and the second plant.