Patents by Inventor Yuping Xia

Yuping Xia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12198946
    Abstract: Embodiments of wet processing systems and methods for uniform wet processing are disclosed. A method described in the present disclosure includes measuring one or more wafer characteristics of a wafer using a plurality of detectors and determining a wafer profile of the wafer based on the measured one or more wafer characteristics. The method also includes setting first and second sets of wet processing parameters of a wet processing system for respective first and second wafer regions based on the wafer profile, where a value of at least one wet processing parameter is different between the first and second sets of wet processing parameters. The method further includes performing wet processing on the wafer by dispensing one or more chemicals onto the first and second wafer regions according to the respective first and second sets of wet processing parameters.
    Type: Grant
    Filed: January 12, 2022
    Date of Patent: January 14, 2025
    Assignee: Yangtze Memory Technologies Co., Ltd.
    Inventors: Gonglian Wu, Yonggang Yang, Xianglin Lv, Rong Xu, Yuping Xia, Kaiyuan Liu, Jun Li, Zhenzhen Zhang, Jingyu Bai
  • Publication number: 20240379787
    Abstract: Examples of the present application disclose a semiconductor device and a fabrication method thereof and a memory system. The semiconductor device includes: a stack structure including first regions and second regions; channel structures that are located in the first regions and penetrate through the stack structure along a first direction; and gate line isolation structures that are located in the second regions and extend along a second direction, wherein the gate line isolation structures penetrate through the stack structure along the first direction and are in a concavo-convex shape along a third direction.
    Type: Application
    Filed: November 14, 2023
    Publication date: November 14, 2024
    Inventors: Jiaming Luo, Hao Pu, Jie Lin, Yonggang Yang, YuPing Xia
  • Publication number: 20240206163
    Abstract: A 3D memory device includes a conductor/insulator stack containing a conductive layer and a dielectric layer alternatingly stacked, a channel hole structure in the conductor/insulator stack, and a gate line slit (GLS) structure. The GLS structure includes a main section and an end section. The main section extends along a first direction and has a first width measured along a second direction that is perpendicular to the first direction. The end section has a second width measured along the second direction. The second width is larger than the first width.
    Type: Application
    Filed: December 28, 2022
    Publication date: June 20, 2024
    Inventors: Jiandong WANG, Wenbin SUN, Siliu ZHANG, Xiaofen ZHENG, Yuping XIA, Yonggang YANG
  • Publication number: 20240206162
    Abstract: A 3D memory device includes a conductor/insulator stack, a region of memory cells in the conductor/insulator stack, and a gate line slit (GLS) structure extending along a direction. The GLS structure includes a first section, a second section, and a third section. The second section is between the first and third sections. The width of the second section is larger than the widths of the first and third sections.
    Type: Application
    Filed: December 28, 2022
    Publication date: June 20, 2024
    Inventors: Jiandong WANG, Junyang XU, Sheng XIA, Wenbin SUN, Xiaofen ZHENG, Yuping XIA
  • Publication number: 20230068091
    Abstract: In a method for fabricating a semiconductor device, a stack of alternating insulating layers and sacrificial layers are formed over a substrate. A staircase having a plurality of steps are formed in the stack, where each of the plurality of steps has a tread and a riser and further includes a respective pair of the insulating layer and the sacrificial layer over the insulating layer of the respective step. A dielectric layer is formed along the treads and risers of the plurality of steps. The dielectric layer is doped with one or a combination of carbon, phosphorous, boron, arsenic, and oxygen. The sacrificial layers are further replaced with a conductive material to form word line layers that are arranged between the insulating layers. A plurality of word line contacts are formed to extend from the word line layers of the plurality of steps, and further extend through the dielectric layer.
    Type: Application
    Filed: October 18, 2021
    Publication date: March 2, 2023
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Xiongyu WANG, Yi ZHOU, Li ZHANG, XinSheng WANG, Hsing-An LO, GaoSheng ZHANG, YuPing XIA, Fei XIE
  • Publication number: 20220139732
    Abstract: Embodiments of wet processing systems and methods for uniform wet processing are disclosed. A method described in the present disclosure includes measuring one or more wafer characteristics of a wafer using a plurality of detectors and determining a wafer profile of the wafer based on the measured one or more wafer characteristics. The method also includes setting first and second sets of wet processing parameters of a wet processing system for respective first and second wafer regions based on the wafer profile, where a value of at least one wet processing parameter is different between the first and second sets of wet processing parameters. The method further includes performing wet processing on the wafer by dispensing one or more chemicals onto the first and second wafer regions according to the respective first and second sets of wet processing parameters.
    Type: Application
    Filed: January 12, 2022
    Publication date: May 5, 2022
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Gonglian WU, Yonggang YANG, Xianglin LV, Rong XU, Yuping XIA, Kaiyuan LIU, Jun Li, Zhenzhen ZHANG, Jingyu BAI
  • Publication number: 20200243352
    Abstract: Embodiments of wet processing systems and methods for uniform wet processing are disclosed. A method described in the present disclosure includes measuring one or more wafer characteristics of a wafer using a plurality of detectors and determining a wafer profile of the wafer based on the measured one or more wafer characteristics. The method also includes setting first and second sets of wet processing parameters of a wet processing system for respective first and second wafer regions based on the wafer profile, where a value of at least one wet processing parameter is different between the first and second sets of wet processing parameters. The method further includes performing wet processing on the wafer by dispensing one or more chemicals onto the first and second wafer regions according to the respective first and second sets of wet processing parameters.
    Type: Application
    Filed: May 13, 2019
    Publication date: July 30, 2020
    Applicant: Yangtze Memory Technologies Co., Ltd.
    Inventors: Gonglian WU, Yonggang YANG, Xianglin LV, Rong XU, Yuping XIA, Kaiyuan LIU, Jun LI, Zhenzhen ZHANG, Jingyu BAI
  • Publication number: 20040266686
    Abstract: Methods of treating diseases in which plasma leakage and/or vascular permeability occurs, for example, inflammatory skin diseases, particularly psoriasis, with a vascular endothelial growth factor (VEGF) antagonist. Further included are methods for enhacing wound healing with a VEGF antagonist.
    Type: Application
    Filed: April 16, 2004
    Publication date: December 30, 2004
    Inventors: Yuping Xia, John S. Rudge, George D. Yancopoulos
  • Patent number: 6833349
    Abstract: Modified chimeric polypeptides with improved pharmacokinetics are disclosed. Specifically, modified chimeric Flt1 receptor polypeptides that have been modified in such a way as to improve their pharmacokinetic profile are disclosed. Also disclosed are methods of making and using the modified polypeptides including but not limited to using the modified polypeptides to decrease or inhibit plasma leakage and/or vascular permeability in a mammal. Also disclosed are methods of treating diseases in which plasma leakage and/or vascular permeability occurs, for example, inflammatory skin diseases.
    Type: Grant
    Filed: January 31, 2001
    Date of Patent: December 21, 2004
    Assignee: Regeneron Pharmaceuticals, Inc.
    Inventors: Yuping Xia, John S. Rudge, George D. Yancopoulos
  • Publication number: 20030017977
    Abstract: Modified chimeric polypeptides with improved pharmacokinetics are disclosed. Specifically, modified chimeric Fit1 receptor polypeptides that have been modified in such a way as to improve their pharmacokinetic profile are disclosed. Also disclosed are methods of making and using the modified polypeptides including but not limited to using the modified polypeptides to decrease or inhibit plasma leakage and/or vascular permeability in a mammal. Also disclosed are methods of treating diseases in which plasma leakage and/or vascular permeability occurs, for example, inflammatory skin diseases.
    Type: Application
    Filed: January 31, 2001
    Publication date: January 23, 2003
    Inventors: Yuping Xia, John S. Rudge, George D. Yancopoulos