Abstract: A system and method for specimen examination, the system comprising a processing and memory circuitry (PMC) for: obtaining an image of at least a part of a specimen, the image acquired by an examination tool; receiving one or more characteristics of a defect of interest and a location of interest associated therewith; modifying within the image one or more pixels corresponding to the location of interest, wherein the modification is provided in accordance with a characteristic of the defect of interest, thereby planting the defect of interest into the image; processing the modified image to detect locations of potential defects of the specimen in accordance with a detection recipe; and determining whether the detected locations include the location of interest. Subject to the location of interest not being detected, modifying the detection recipe to enable detecting the planted defect of interest at the location of interest.

Abstract: A method and system for detecting defects in a specimen, the method comprising: obtaining an image comprising a plurality of pixels of a specimen part; processing the image according to a detection recipe to derive information related to potential defects in the specimen, the information comprising a first data set informative of first locations identified, in accordance with the detection recipe as locations of potential defects, and a second data set informative of second locations not identified as locations of potential defects; receiving data specifying targeted locations of interest within the part of the specimen; when the first data set is not informative of each targeted location, generating a third data set by adding to the first data set information related to the missing targeted location from the second data set, the information bearing an indication that it corresponds to a targeted location; and outputting the third data set.

Abstract: A method and system for detecting defects in a specimen, the method comprising: obtaining an image comprising a plurality of pixels of a specimen part; processing the image according to a detection recipe to derive information related to potential defects in the specimen, said information comprising a first data set informative of first locations identified, in accordance with the detection recipe as locations of potential defects, and a second data set informative of second locations not identified as locations of potential defects; receiving data specifying targeted locations of interest within the part of the specimen; when the first data set is not informative of each targeted location, generating a third data set by adding to the first data set information related to the missing targeted location from the second data set, the information bearing an indication that it corresponds to a targeted location; and outputting the third data set.

Abstract: A system and method for specimen examination, the system comprising a processing and memory circuitry (PMC) for: obtaining an image of at least a part of a specimen, the image acquired by an examination tool; receiving one or more characteristics of a defect of interest and a location of interest associated therewith; modifying within the image one or more pixels corresponding to the location of interest, wherein the modification is provided in accordance with a characteristic of the defect of interest, thereby planting the defect of interest into the image; processing the modified image to detect locations of potential defects of the specimen in accordance with a detection recipe; and determining whether the detected locations include the location of interest. Subject to the location of interest not being detected, modifying the detection recipe to enable detecting the planted defect of interest at the location of interest.

Abstract: A calibration network system for an array antenna and method for calibrating of the array antenna are described. The system includes a pair of rectangular waveguides stacked in parallel relation to each other and spaced apart at a distance of a quarter of an operating wavelength. The rectangular waveguides includes through-holes extending through a side-wall of the stacked rectangular waveguides from a bottom of a lower waveguide to a top of an upper waveguide to accommodate coaxial transmission lines. The side-wall has openings between the through-holes and an interior region of the rectangular waveguides in order to provide coupling of the coaxial transmission lines into the pair of rectangular waveguides. The system includes 90 degree phase shifter coupled to the upper rectangular waveguide, and a power divider/combiner coupled to a reference T/R Module, to the 90 degree phase shifter and to the lower rectangular waveguide.

Abstract: A calibration network system for an array antenna and method for calibrating of the array antenna are described. The system includes a pair of rectangular waveguides stacked in parallel relation to each other and spaced apart at a distance of a quarter of an operating wavelength. The rectangular waveguides includes through-holes extending through a side-wall of the stacked rectangular waveguides from a bottom of a lower waveguide to a top of an upper waveguide to accommodate coaxial transmission lines. The side-wall has openings between the through-holes and an interior region of the rectangular waveguides in order to provide coupling of the coaxial transmission lines into the pair of rectangular waveguides. The system includes 90 degree phase shifter coupled to the upper rectangular waveguide, and a power divider/combiner coupled to a reference T/R Module, to the 90 degree phase shifter and to the lower rectangular waveguide.