Patents by Inventor Yuri Kimura

Yuri Kimura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230206418
    Abstract: An etching processing system includes a memory, and a processor coupled to the memory and configured to predict etching quality of a substrate by inputting image data of the substrate into a trained model trained by using training data in which image data of substrates captured by an imaging device arranged on a transfer path of the substrates and information for predicting etching quality of the substrates are associated with each other.
    Type: Application
    Filed: March 7, 2023
    Publication date: June 29, 2023
    Inventors: Joji TAKAYOSHI, Hidehiko SATO, Yuri KIMURA, Hirokazu KYOKANE
  • Publication number: 20230078310
    Abstract: A method of detecting a deviation amount of a substrate transport position includes: setting a temperature of a substrate support surface to the same temperature over an entire substrate support surface; etching a first etching target film formed on a substrate; acquiring a first etching rate that is an etching rate of the first etching target film; setting the temperature of the substrate support surface to be concentrically and gradually increased from a central portion to a peripheral edge portion; etching a second etching target film formed on the substrate, the second etching target film being same kind as the first etching target film; acquiring a second etching rate that is an etching rate of the second etching target film; calculating a difference between the acquired first etching rate and second etching rate; and calculating the deviation amount of the substrate transport position based on the calculated difference.
    Type: Application
    Filed: September 13, 2022
    Publication date: March 16, 2023
    Applicant: Tokyo Electron Limited
    Inventors: Joji TAKAYOSHI, Yuri KIMURA
  • Patent number: 11467560
    Abstract: An engineering support system that supports engineering of a process control system, includes: a storage; and a processor connected to the storage and that: transforms design drawings into semantic models and outputs the semantic models to the storage; and generates a combined semantic model by combining the semantic models based on a degree of similarity among the semantic models and outputs the combined semantic model to the storage, wherein each of the semantic models is expressed by first information indicating elements included in the design drawings and second information indicating a relationship between the elements.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: October 11, 2022
    Assignee: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Isao Hirooka, Tatenobu Seki, Takahiro Kambe, Yuta Machida, Yuri Kimura, Masato Annen, Nobuaki Ema
  • Publication number: 20220310369
    Abstract: A substrate processing apparatus includes a process module that includes: a stage having a first surface on which a substrate is placed and a second surface, a process module including an edge ring placed on the second surface, a measurement unit measuring an etching rate of the substrate; and a controller. The controller transfers the substrate to different transfer positions on the first surface and etches the substrate for each transfer position, acquires etching rates at points on a concentric circle of the substrate in an end of the substrate, for each transfer position, from the measurement unit, generates an approximate curve of each of the concentric circles based on each of the acquired etching rates for each transfer position, calculates each linear expression representing a movement direction of the substrate, based on the approximate curve for each transport position, and calculates an intersection coordinate of the linear expressions.
    Type: Application
    Filed: March 28, 2022
    Publication date: September 29, 2022
    Inventors: Joji TAKAYOSHI, Hidehiko SATO, Hiroshi NAGAHATA, Yuri KIMURA
  • Publication number: 20220155942
    Abstract: The present disclosure provides an information processing apparatus, an information processing method, and a program that enable easy extraction of all element groups conforming to a specific element group from a drawing with a small number of person-hours. An information processing apparatus (10) includes a processor (11) configured to receive from a user a selection of a search element group, which is an element group formed by one or more elements used in a drawing, search from the drawing an element group that conforms to the search element group for which the selection was received, and display the searched element group on a display (15) in correspondence with the position thereof on the drawing.
    Type: Application
    Filed: November 17, 2021
    Publication date: May 19, 2022
    Applicant: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Tatenobu SEKI, Takahiro KAMBE, Yuri KIMURA, Masato ANNEN
  • Publication number: 20200201285
    Abstract: An engineering support system that supports engineering of a process control system, includes: a storage; and a processor connected to the storage and that: transforms design drawings into semantic models and outputs the semantic models to the storage; and generates a combined semantic model by combining the semantic models based on a degree of similarity among the semantic models and outputs the combined semantic model to the storage, wherein each of the semantic models is expressed by first information indicating elements included in the design drawings and second information indicating a relationship between the elements.
    Type: Application
    Filed: December 23, 2019
    Publication date: June 25, 2020
    Applicant: YOKOGAWA ELECTRIC CORPORATION
    Inventors: Isao Hirooka, Tatenobu Seki, Takahiro Kambe, Yuta Machida, Yuri Kimura, Masato Annen, Nobuaki Ema
  • Patent number: 9658293
    Abstract: A power supply unit comprises a battery, current and voltage detecting portions, and a remaining capacity computing portion. The remaining capacity computing portion comprises a first computing portion computing a first open circuit terminal voltage based on current and voltage values from the current and voltage detecting portions, and computing a first remaining capacity based on the first open circuit terminal voltage, a second computing portion computing a second open circuit terminal voltage based on the current and voltage values, an ohmic resistance voltage drop and a polarization resistance voltage drop, and computing a second remaining capacity based on the second open circuit terminal voltage, a third computing portion calculating a third remaining capacity based on an integrated value by integrating the current, and a main computing portion computing a real remaining capacity of the battery based on the first and/or third remaining capacity, and the second remaining capacity.
    Type: Grant
    Filed: February 23, 2013
    Date of Patent: May 23, 2017
    Assignee: SANYO ELECTRIC CO., LTD.
    Inventors: Yuri Kimura, Kentaro Uemura, Daiki Hamada, Hiroya Murao
  • Publication number: 20140343877
    Abstract: A power supply unit comprises a battery, current and voltage detecting portions, and a remaining capacity computing portion. The remaining capacity computing portion comprises a first computing portion computing a first open circuit terminal voltage based on current and voltage values from the current and voltage detecting portions, and computing a first remaining capacity based on the first open circuit terminal voltage, a second computing portion computing a second open circuit terminal voltage based on the current and voltage values, an ohmic resistance voltage drop and a polarization resistance voltage drop, and computing a second remaining capacity based on the second open circuit terminal voltage, a third computing portion calculating a third remaining capacity based on an integrated value by integrating the current, and a main computing portion computing a real remaining capacity of the battery based on the first and/or third remaining capacity, and the second remaining capacity.
    Type: Application
    Filed: February 23, 2013
    Publication date: November 20, 2014
    Inventors: Yuri Kimura, Kentaro Uemura, Daiki Hamada, Hiroya Murao