Patents by Inventor Yuri TAKEBAYASHI

Yuri TAKEBAYASHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240096666
    Abstract: According to the present disclosure, there is provided a technique capable of rapidly identifying a cause of an occurrence of a failure and supporting a recovery. There is provided a technique that includes: a memory storing recipes, apparatus information reported from within the substrate processing apparatus and failure information; a process vessel in which a substrate is processed based on a recipe; and a controller for: (i) storing failure data in the memory together with an occurrence time of the failure contained in the failure information when the failure occurs in the substrate processing apparatus, the failure data containing first apparatus-related information reported before the failure during a first period defined in advance and the recipe in the memory; and (ii) adding second apparatus-related information reported after the failure during a second period defined in advance to the failure data.
    Type: Application
    Filed: September 18, 2023
    Publication date: March 21, 2024
    Applicant: Kokusai Electric Corporation
    Inventors: Yuri TAKEBAYASHI, Shinichiro MORI, Junichi KAWASAKI