Abstract: Proposed is a method of synthesizing a solid-state electrolyte of Li3HalO formula for use in a lithium-ion battery. The method consists of uniformly mixing at least LiOH and LiHal in a stoichiometric quantities, heating the prepared mixture to a melting temperature and causing a reaction of formula (2LiOH+LiHal=Li3HalO+H2O) between the at least LiOH and LiHal in a process free of forming a perovskite structure and at a temperature, at which H2O that forms at the aforementioned reaction is converted into a bound form, whereby a reaction product is obtained. According to another modification of the method, prior to the stage of melting the mixture, a reinforcement mesh is immersed into the mixture, whereby after mixture is solidified, a solid-state electrolyte reinforced with the mixture embedded into its material is obtained.

Abstract: The propose method of manufacturing a solid-state lithium battery consists of preparing an anode coated with a solid-state electrolyte precursor and a cathode unit coated with solid-state electrolyte, both precursors containing a predetermined amount of a redundant water. The thus prepared anode unit and cathode unit are pressed to each other through their respective electrolyte precursor layers in a closed chamber at a predetermined elevated temperature and under a predetermined mechanical pressure, whereby an integral pre-final solid-state battery unit is formed. The manufacture of the battery is completed by inserting the prefinal product into a casing that leaves parts of the metal current collectors of the prefinal product exposed for use as a battery anode and a battery cathode.

Abstract: The propose method of manufacturing a solid-state lithium battery consists of preparing an anode coated with a solid-state electrolyte precursor and a cathode unit coated with solid-state electrolyte, both precursors containing a predetermined amount of a redundant water. The thus prepared anode unit and cathode unit are pressed to each other through their respective electrolyte precursor layers in a closed chamber at a predetermined elevated temperature and under a predetermined mechanical pressure, whereby an integral pre-final solid-state battery unit is formed. The manufacture of the battery is completed by inserting the prefinal product into a casing that leaves parts of the metal current collectors of the prefinal product exposed for use as a battery anode and a battery cathode.

Abstract: Proposed is a method of synthesizing a solid-state electrolyte of Li3HaIO formula for use in a lithium-ion battery. The method consists of uniformly mixing at least LiOH and LiHaI in a stoichiometric quantities, heating the prepared mixture to a melting temperature and causing a reaction of formula (2LiOH+LiHaI=Li3HaIO+H2O) between the at least LiOH and LiHaI in a process free of forming a perovskite structure and at a temperature, at which H2O that forms at the aforementioned reaction is converted into a bound form, whereby a reaction product is obtained. According to another modification of the method, prior to the stage of melting the mixture, a reinforcement mesh is immersed into the mixture, whereby after mixture is solidified, a solid-state electrolyte reinforced with the mixture embedded into its material is obtained.

Abstract: A method of manufacturing porous electrodes based on the use of a CNT tapes is proposed. The pore size of the CNT tape material is regulated by using chemical reactions of active gases with carbon on the surfaces of the pores so that when gaseous reaction products leave the pores, the pore sizes increase, and when solid reaction products precipitate on the pore walls, the pores decrease. By selecting conditions for the chemical interaction of the active components, it is possible to achieve optimal pore sizes due to their increase or decrease. Optimal pore sizes are understood to mean sizes that will make it possible to obtain batteries or super capacitors with improved characteristics.

Abstract: The invention provides a method and apparatus for measuring temperature of a conductive film or coating on a non-conductive substrate or on a substrate having conductivity significantly lower than that of the film or coating. The temperature is measured with the use of an inductive sensor as at least one of electrical characteristics of the film or coating the relation of which with the temperature is known. The invention is intended for use in processes that involve heating of the conductive film or coating, e.g., annealing. The sensor is located on the side of the object-holding chuck opposite to the object but at a distance from the object that provides sensitivity of the sensor. A distinguishing feature of the invention is a shield formed from a layer of a dielectric-liquid that is permeable to electromagnetic waves but resistant to permeation of heat flow.

Abstract: An apparatus for measuring thickness in super-thin films consists of a special resonator unit in the form of an open-bottom cylinder which is connected to a microwave swept frequency microwave source via a decoupler and a matching unit installed in a waveguide that connects the resonator unit with the microwave source. The apparatus operates on the principle that thin metal film F, the thickness of which is to be measured, does not contact the end face of the open bottom of the cylindrical resonator sensor unit and functions as a bottom of the cylindrical body. The design of the resonator excludes generation of modes other than the resonance mode and provides the highest possible Q-factor. As the conductivity directly related to the film thickness, it is understood that measurement of the film thickness is reduced to measurement of the resonance peak amplitudes.

Abstract: The system of the invention for measuring characteristics of thin conductive and non-conductive material, such as bulk material or films, is based on the use of a resonance oscillating circuit that incorporates at least two components selected from the group consisting of an inductive coil and a capacitor, which in combination form a sensor that could be approached close to the surface to be measured. The measurement of the film or material characteristics, such as film resistance (film thickness) or a dielectric constant (film thickness) of a non-conductive material, is based on the principle that the sensor is approached to the measured surface at a distance, at which the inductance and capacitance of the sensor generate in the measured material a virtual coil and an additional capacitance, which strongly depend on the characteristics of the measured material.

Abstract: An apparatus of the invention is intended for multiple identical continuous records of characteristics on the surface of an object, e.g., a semiconductor wafer, after selected stages of manufacture and treatment. The apparatus is provided with a rotary table for rotation of the wafer with a mechanism for installing the wafer in a predetermined initial position for starting measurements from the same point after each selected stage of manufacture or treatment. The measurements are synchronized for all sequential manufacturing stages of the wafer and are carried out with the use of a resonance sensor based on the principles of resonance sensor technology. The recorded information is stored on a memory device, and if the final product has a defect or deviations, the stored information can be easily retrieved for revealing the time, place on the product, and the source of the defect.

Abstract: The system of the invention for measuring characteristics of thin conductive and non-conductive material, such as bulk material or films, is based on the use of a resonance oscillating circuit that incorporates at least two components selected from the group consisting of an inductive coil and a capacitor, which in combination form a sensor that could be approached close to the surface to be measured. The measurement of the film or material characteristics, such as film resistance (film thickness) or a dielectric constant (film thickness) of a non-conductive material, is based on the principle that the sensor is approached to the measured surface at a distance, at which the inductance and capacitance of the sensor generate in the measured material a virtual coil and an additional capacitance, which strongly depend on the characteristics of the measured material.

Abstract: The system and method are based on stabilization of the distance between the sensor coil and the surface of the film being measured by constantly measuring the angle of inclination &agr; of a tangent to the curve that represent dependence of the resonance power of the sensor-film system from the distance between the sensor and the film. The aforementioned angle is calculated plotting the resonance curve of a signal, calculating the area between the resonance curve and the abscissa axis, plotting the curve that represent dependence of the aforementioned area from the distance between the sensor coil and the film, measuring the angle &agr; in a preselected point on the last-mentioned curve, and maintaining the distance between the sensor coil and the film constant by keeping angle &agr; constant in a any measurement point. Angle &agr; can be selected within the range of 0 to 90° C.

Abstract: The invention relates to an apparatus and method for measuring thickness and deviations from the thickness of very thin conductive coatings on various non-conductive substrates, or of very thin non-conductive coatings on conductive substrates. The apparatus consists of an inductive coil having specific parameters, an external AC generator operating on frequencies, e.g., from 50 MHz to 2.5 GHz, preferably from 100 MHz to 200 MHz, and a measuring instrument, such as an oscilloscope, voltmeter, etc. for measuring output of the sensor. The coil has miniature dimensions. The invention is based on the principle that inductive coil of the sensor, active resistance of the coil winding, inherent capacitance of the inductive coil (or a separate capacitor built into the sensor's circuit), and the aforementioned AC generator form a parallel oscillating circuit.

Abstract: A universal electromagnetic resonance system is aimed at detecting and measuring local non-uniformities in objects made from conductive or non-conductive materials. The system comprises a composite measuring unit composed of two identical and symmetrically arranged individual oscillation circuits with measurement elements in the form of identical and symmetrically arranged inductive coils or capacitor chips. The unit is connected to an impedance analyzer for supplying RF current and for measuring the voltage signal in the oscillation circuit. Since all the elements of individual oscillation circuits are identical, in the case of non-uniformity of the object on the scanned area, the parameters of the resonance will hanged. This change will violate the symmetry in the operation of the individual oscillation circuits. The variation in measured signal can be calibrated in terms of the target parameter or characteristic of the object.

Abstract: An apparatus for measuring thickness in super-thin films consists of a special resonator unit in the form of an open-bottom cylinder which is connected to a microwave swept frequency microwave source via a decoupler and a matching unit installed in a waveguide that connects the resonator unit with the microwave source. The apparatus operates on the principle that thin metal film F, the thickness of which is to be measured, does not contact the end face of the open bottom of the cylindrical resonator sensor unit and functions as a bottom of the cylindrical body. The design of the resonator excludes generation of modes other than the resonance mode and provides the highest possible Q-factor. As the conductivity directly related to the film thickness, it is understood that measurement of the film thickness is reduced to measurement of the resonance peak amplitudes.

Abstract: An apparatus of the invention is intended for multiple identical continuous records of characteristics on the surface of an object, e.g., a semiconductor wafer, after selected stages of manufacture and treatment. The apparatus is provided with a rotary table for rotation of the wafer with a mechanism for installing the wafer in a predetermined initial position for starting measurements from the same point after each selected stage of manufacture or treatment. The measurements are synchronized for all sequential manufacturing stages of the wafer and are carried out with the use of a resonance sensor based on the principles of resonance sensor technology. The recorded information is stored on a memory device, and if the final product has a defect or deviations, the stored information can be easily retrieved for revealing the time, place on the product, and the source of the defect.

Abstract: A universal electromagnetic resonance system is aimed at detecting and measuring local non-uniformities in objects made from conductive or non-conductive materials. The system comprises a composite measuring unit composed of two identical and symmetrically arranged individual oscillation circuits with measurement elements in the form of identical and symmetrically arranged inductive coils or capacitor chips. The unit is connected to an impedance analyzer for supplying RF current and for measuring the voltage signal in the oscillation circuit. Since all the elements of individual oscillation circuits are identical, in the case of non-uniformity of the object on the scanned area, the parameters of the resonance will hanged. This change will violate the symmetry in the operation of the individual oscillation circuits. The variation in measured signal can be calibrated in terms of the target parameter or characteristic of the object.

Abstract: The invention relates to an apparatus and method for measuring thickness and deviations from the thickness of very thin conductive coatings on various non-conductive substrates, or of very thin non-conductive coatings on conductive substrates. The apparatus consists of an inductive coil having specific parameters, an external AC generator operating on frequencies, e.g., from 50 MHz to 2.5 GHz, preferably from 100 MHz to 200 MHz, and a measuring instrument, such as an oscilloscope, voltmeter, etc. for measuring output of the sensor. The coil has miniature dimensions. The invention is based on the principle that inductive coil of the sensor, active resistance of the coil winding, inherent capacitance of the inductive coil (or a separate capacitor built into the sensor's circuit), and the aforementioned AC generator form a parallel oscillating circuit.