Patents by Inventor Yuri Yonekura

Yuri Yonekura has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ETCHING METHOD, METHOD FOR MANUFACTURING MICROSTRUCTURE, AND ETCHING APPARATUS
    Publication number: 20110143549
    Abstract: In one embodiment, an etching method is disclosed. The method can include producing an oxidizing substance by electrolyzing a sulfuric acid solution, and producing an etching solution having a prescribed oxidizing species concentration by controlling a produced amount of the produced oxidizing substance. The method can include supplying the produced etching solution to a surface of a workpiece.
    Type: Application
    Filed: December 8, 2010
    Publication date: June 16, 2011
    Applicants: KABUSHIKI KAISHA TOSHIBA, SHIBAURA MECHATRONICS CORPORATION, CHLORINE ENGINEERS CORP. LTD.
    Inventors: Makiko TANGE, Naoya Hayamizu, Nobuyoshi Sato, Yuri Yonekura, Hideaki Hirabayashi, Yoshiaki Kurokawa, Nobuo Kobayashi, Masaaki Kato, Hiroki Domon
  • Apparatus for evaluating characteristics of semiconductor device and method of evaluating characteristics of semiconductor device using the same
    Patent number: 5491425
    Abstract: A probe is attached to a support plate vertically to the surface of the support plate. A drop of a molten metal is formed at a tip portion of the probe. The support plate has a heater for setting the temperature of the probe and the drop of the molten metal at the tip portion of the probe. The probe is situated at a position corresponding to a position of an electrode of an LSI. The probe is connected to a measuring device for evaluating characteristics of the LSI by wiring. The drop of the molten metal connects the probe and the electrode of the LSI electrically.
    Type: Grant
    Filed: March 22, 1994
    Date of Patent: February 13, 1996
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Toru Watanabe, Yuri Yonekura, Katsuya Okumura