Patents by Inventor Yurii Victorvitch Sidelnikov

Yurii Victorvitch Sidelnikov has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Assembly for detection of radiation flux and contamination of an optical component, lithographic apparatus including such an assembly and device manufacturing method
    Patent number: 7800079
    Abstract: An assembly for detection of at least one of radiation flux and contamination on an optical component includes a detector configured to receive at least one of the radiation flux and contamination, and when the assembly is in use, to generate a detector signal correlated to at least one of the radiation flux and contamination on the component. A meter is configured to measure the detector signal. The detector includes at least one wire.
    Type: Grant
    Filed: December 22, 2003
    Date of Patent: September 21, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens, Yurii Victorvitch Sidelnikov, Marcel Mathijs Theodore Marie Dierichs, Marius Ravensbergen