Patents by Inventor Yurika KANNO

Yurika KANNO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD
    Publication number: 20220280969
    Abstract: In one embodiment, a substrate treatment apparatus includes a mixer configured to mix a first liquid including a metal element and a second liquid being basicity to generate a third liquid including the metal element and being basicity. The apparatus further includes a supplier configured to supply the third liquid to a substrate. The apparatus further includes a first flow path configured to convey the third liquid from the mixer to the supplier not through a filter that removes particles from the third liquid.
    Type: Application
    Filed: August 17, 2021
    Publication date: September 8, 2022
    Applicant: Kioxia Corporation
    Inventors: Yurika KANNO, Hisashi OKUCHI, Yohei YAMAMOTO