Patents by Inventor Yuriko Mizuta, legal representative

Yuriko Mizuta, legal representative has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Infrared sensor manufacturing method suitable for mass production
    Patent number: 7781030
    Abstract: An infrared sensor manufacturing method according to this invention includes a step of forming a bridge structure of an insulating material on an Si substrate, a step of forming a vanadium oxide thin film on the bridge structure by a dry film forming method, a step of irradiating laser light onto the vanadium oxide thin film to thereby change material properties thereof, a step of forming the vanadium oxide thin film with the changed material properties into a bolometer resistor having a predetermined pattern, and a step of forming a protective layer of an insulating material so as to cover the bolometer resistor having the predetermined pattern and the bridge structure.
    Type: Grant
    Filed: February 27, 2007
    Date of Patent: August 24, 2010
    Assignees: National Institute of Advanced Industrial Science and Technology, NEC Corporation
    Inventors: Tetsuo Tsuchiya, Susumu Mizuta, Yuriko Mizuta, legal representative, Toshiya Kumagai, Toshihito Sasaki, Seiji Kurashina